Preparation and Investigation of Textured AZO Transparent Conductive Thin Film by Directly Dry Etching

WANG Wen-na; ZHANG Da-wei; TAO Chun-xian; HUANG Yuan-shen; NI Zheng-ji; ZHUANG Song-lin

doi:10.3969/j.issn.1003-501x.2012.02.027

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