Xiuhua FU, Junqi LIU, Zhuolin LI, Haicheng LIU, Haifeng REN, Yibo WANG, Kexu HAN. Study on Thickness Uniformity of Double-sided Sputtering Film on Large-diameter Ultra-thin Substrates[J]. Acta Photonica Sinica, 2023, 52(6): 0631001
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