• Microelectronics
  • Vol. 52, Issue 4, 640 (2022)
ZHOU Jiacheng, XUE Zhicheng, and WANG Debo
Author Affiliations
  • [in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.220036 Cite this Article
    ZHOU Jiacheng, XUE Zhicheng, WANG Debo. A Piezoelectric Energy Harvester with Right Angle Helical Cantilever Structure[J]. Microelectronics, 2022, 52(4): 640 Copy Citation Text show less
    References

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    [7] FANG H,LIU J,XU Z. Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting [J]. Microelec, 2006, 37(11): 1280-1284

    [9] DEBNATH B, KUMAR R. Design and simulation study of a new flared-U shaped springs based MEMS piezoelectric vibration energy harvester [C]// IEEE Int Conf Comput Power & Commun Technol. Greater Noida, India. 2020: 101-105.

    [11] MOCHIDA Y, ILANKO S. On the Rayleigh-Ritz method, Gorman's superposition method and the exact dynamic stiffness method for vibration and stability analysis of continuous systems [J]. Thin-Walled Structu, 2021, 161: 107470.

    [13] HUANG P C, TSAI T H, YANG Y J. Wide-bandwidth piezoelectric energy harvester integrated with parylene-C beam structures [J]. Microelec Engineer, 2013, 111: 214-219.

    ZHOU Jiacheng, XUE Zhicheng, WANG Debo. A Piezoelectric Energy Harvester with Right Angle Helical Cantilever Structure[J]. Microelectronics, 2022, 52(4): 640
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