• Journal of Infrared and Millimeter Waves
  • Vol. 43, Issue 2, 200 (2024)
Jing YUAN1,2, Guan-Jun JING1,2, Jian-Chao WANG1,2, Liu WANG1,2..., Run-Hua GAO1, Yi-Chuan ZHANG1, Yi-Xu YAO1,2, Ke WEI1, Yan-Kui LI1 and Xiao-Juan CHEN1,*|Show fewer author(s)
Author Affiliations
  • 1High-Frequency High-Voltage Device and Integrated Circuits R&D Center,Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China
  • 2University of Chinese Academy of Sciences,Beijing 100029,China
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    DOI: 10.11972/j.issn.1001-9014.2024.02.009 Cite this Article
    Jing YUAN, Guan-Jun JING, Jian-Chao WANG, Liu WANG, Run-Hua GAO, Yi-Chuan ZHANG, Yi-Xu YAO, Ke WEI, Yan-Kui LI, Xiao-Juan CHEN. High-performance MOCVD-SiNx/AlN/GaN MIS-HEMTs with low noise and high linearity for millimeter waves[J]. Journal of Infrared and Millimeter Waves, 2024, 43(2): 200 Copy Citation Text show less
    References

    [1] F Medjdoub, Y Tagro, M Zegaoui et al. Sub-1-dB Minimum-Noise-Figure Performance of GaN-on-Si Transistors Up to 40 GHz. Electron Device Letters, IEEE, 33, 1258-1260(2012).

    [2] X Lu, J Ma, H Jiang et al. Low trap states in in situ SiNx/AlN/GaN metal-insulator-semiconductor structures grown by metal-organic chemical vapor deposition. Applied Physics Letters, 105, 287-305(2014).

    [3] Choi Woojin, Renjie Chen, Levy Cooper et al. Intrinsically Linear Transistor for Millimeter-Wave Low Noise Amplifiers. Nano letters, 20, 2812-2820(2020).

    [4] Y Yao, Q Jiang, S Huang et al. Identification of bulk and interface state-induced threshold voltage instability in metal/SiNx(insulator)/AlGaN/GaN high-electron-mobility transistors using deep-level transient spectroscopy. Japanese Journal of Applied Physics, 119, 233502(2021).

    [5] F Guo, S Huang, X Wang et al. Suppression of interface states between nitride-based gate dielectricss and ultrathin-barrier AlGaN/GaN heterostructure with in situ remote plasma pretreatments. Applied Physics Letters, 118, 093503(2021).

    [6] M. Guidry, B. Romanczyk, H. Li et al. Demonstration of 30 GHz OIP3/PDC > 10 dB by mm-wave N-polar Deep Recess MISHEMTs. 2019 14th European Microwave Integrated Circuits Conference (EuMIC), 64-6(2019).

    [7] P Shrestha, J F Buckwalter, U K Mishra et al. High Linearity and High Gain Performance of N-Polar GaN MIS-HEMT at 30 GHz. IEEE Electron Device Letters, 1-1(2020).

    [8] M. Guidry, P. Shrestha, Wenjian Liu et al. Improved N-polar GaN mm-wave Linearity, Efficiency, and Noise, 291-294(2022).

    Jing YUAN, Guan-Jun JING, Jian-Chao WANG, Liu WANG, Run-Hua GAO, Yi-Chuan ZHANG, Yi-Xu YAO, Ke WEI, Yan-Kui LI, Xiao-Juan CHEN. High-performance MOCVD-SiNx/AlN/GaN MIS-HEMTs with low noise and high linearity for millimeter waves[J]. Journal of Infrared and Millimeter Waves, 2024, 43(2): 200
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