Method for active spatial alignment and stabilization of laser beams in multi-beam systems

Chenliang Ding; Dazhao Zhu; Chengpeng Ma; Mengbo Tang; Zhenyao Yang; Yong Liu; Cuifang Kuang; Xu Liu

doi:10.3788/COL202321.031201

[1] S. W. Hell, J. Wichmann. Breaking the diffraction resolution limit by stimulated emission: stimulated-emission-depletion fluorescence microscopy. Opt. Lett., 19, 780(1994).

[2] L. Li, R. R. Gattass, E. Gershgoren, H. Hwang, J. T. Fourkas. Achieving λ/20 resolution by one-color initiation and deactivation of polymerization. Science, 324, 910(2009).

[3] T. F. Scott, B. A. Kowalski, A. C. Sullivan, C. N. Bowman, R. R. Mcleod. Two-color single-photon photoinitiation and photoinhibition for subdiffraction photolithography. Science, 324, 913(2009).

[4] P. Müller, R. Müller, L. Hammer, C. Barner-Kowollik, M. Wegener, E. Blasco. STED-inspired laser lithography based on photoswitchable spirothiopyran moieties. Chem. Mater., 31, 1966(2019).

[5] E. Murtezi, S. Puthukodan, B. Buchegger, J. Jacak, T. A. Klar. STED controlled photobleaching for sub-diffractional optical nanopatterning. J. Phys. Photonics, 2, 044003(2020).

[6] J. Ma, X. Li, S. Yu, Q. Han. Influence of satellite vibration on optical communication performance for intersatellite laser links. Opt. Rev., 19, 25(2012).

[7] Q. Feng, B. Zhang, C. Kuang. A straightness measurement system using a single-mode fiber-coupled laser module. Opt. Laser. Technol., 36, 279(2004).

[8] M. A. Schwentker, H. Bock, M. Hofmann, S. Jakobs, J. Bewersdorf, C. Eggeling, S. W. Hell. Wide-field subdiffraction RESOLFT microscopy using fluorescent protein photoswitching. Microsc. Res. Tech., 70, 269(2007).

[9] T. J. Gould, D. Burke, J. Bewersdorf, M. J. Booth. Adaptive optics enables 3D STED microscopy in aberrating specimens. Opt. Express, 20, 20998(2012).

[10] T. J. Gould, E. B. Kromann, D. Burke, M. J. Booth, J. Bewersdorf. Auto-aligning stimulated emission depletion microscope using adaptive optics. Opt. Lett., 38, 1860(2013).

[11] T. Kanai, A. Suda, S. Bohman, M. Kaku, S. Yamaguchi, K. Midorikawa. Pointing stabilization of a high-repetition-rate high-power femtosecond laser for intense few-cycle pulse generation. Appl. Phys. Lett., 92, 061106(2008).

[12] J. Bao, L. Huang, A. Zeng, B. Ren, B. Yang, X. Peng, H. Huang. Study on beam stabilization technique in lithography illumination system. Chin. J. Lasers, 39, 0908004(2012).

[13] S. Liu, S. Tan, Y. Huang, K. C. Fan. Design of a compact four degree-of-freedom active compensation system to restrain laser’s angular drift and parallel drift. Rev. Sci. Instrum., 90, 115002(2019).

[14] M. Dobosz. Interference sensor for ultra-precision measurement of laser beam angular deflection. Rev. Sci. Instrum., 89, 115003(2018).

[15] B. G. Podlaskin, E. G. Guk, A. G. Obolenskov, A. A. Sukharev. Improvement of the accuracy of a position-sensitive detector with a wide field of view. Tech. Phys. Lett., 46, 988(2020).

[16] S. Chatterjee, Y. P. Kumar. Measurement of two-dimensional small angle deviation with a prism interferometer. Appl. Opt., 47, 4900(2008).

[17] Y. Huang, Y. Wang, C. Kuang, X. Liu. Method for enhancing stability in multi-beam microscopy. Meas. Sci. Technol., 27, 105901(2016).

[18] J. Wang, L. Huang, L. Hou, G. He, Q. Song, H. Huang. Study of active beam steering system with a simple method. Chin. Opt. Lett., 12, 081405(2014).

[19] F. Balzarotti, Y. Eilers, K. C. Gwosch, A. H. Gynna, V. Westphal, F. D. Stefani, S. Hell. Nanometer resolution imaging and tracking of fluorescent molecules with minimal photon fluxes. Science, 355, 606(2007).

[20] Z. Gan, Y. Cao, R. A. Evans, M. Gu. Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size. Nat. Commun., 4, 2061(2013).

[21] C. Ding, D. Zhu, Z. Wei, M. Tang, C. F. Kuang, X. Liu. A compact and high-precision method for active beam stabilization system. Opt. Commun., 500, 127328(2021).

[22] S. Shao, Z. Tian, S. Song, M. Xu. Two-degrees-of-freedom piezo-driven fast steering mirror with cross-axis decoupling capability. Rev. Sci. Instrum., 89, 055003(2018).

[23] E. Csencsics, B. Sitz, G. Schitter. Integration of control design and system operation of a high performance piezo-actuated fast steering mirror. IEEE ASME Trans Mechatron., 25, 239(2019).