Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

Ying SONG; Bayanheshig; Shuo LI; Shan JIANG; and Wei WANG

doi:10.1007/s13320-019-0537-x

[1] N. A. Elmahdy, M. S. Esmail, and M. M. El-Okr, “Characterization of a thermal sensor based on one-dimensional photonic crystal with central liquid crystal defect,” Optik, 2018, 170: 444-451.

[2] K. C. Tseng, S. T. Hong, T. H. Lin, T. H. Chuang, and C. C. Fu, “WGP structures patterned by Lloyd′s mirror laser interference lithography system integrate into MEMS physical sensor device,” SPIE, 2016, 9759: 97591E-1-97591E-6.

[3] M. C. Gupta, C. Ungaro, J. J. Foler IV, and S. K. Gray, “Optical nanostructures design, fabrication, and application for solar/thermal energy conversion,” Solar Energy, 2018, 165: 100-114.

[4] K. Lee, J. Lee, B. A. Mazor, and S. R. Forrest, “Transforming the cost of solar-to-electrical energy conversion: integrating thin-film GaAs solar cells with non-tracking mini-concentrators,” Light: Science & Applications, 2015, 4: e288-1-e288-7.

[5] A. M. Shuty, S. V. Eliseeva, and D. I. Sementsov, “Dynamics of the magnetic nanoparticles lattice in an external magnetic field,” Journal of Magnetism and Magnetic Materials, 2018, 464: 76-90.

[6] M. Gu, X. P. Li, and Y. Y. Gao, “Optical storage arrays: a perspective for future big data storage,” Light: Science & Applications, 2014, 3: e177-1-e177-11.

[7] J. Yuan, Y. Y. Xie, Z. X. Geng, C. X. Wang, H. M. Chen, Q. Kan, et al., “Enhanced sensitivity of gold elliptic nanohole array biosensor with the surface plasmon polaritons coupling,” Optical Materials Express, 2015, 5(4): 818-826.

[8] Q. S. Li, L. Cai, Y. H. Ma, J. H. Yang, Y. Yang, Q. J. Meng, et al., “Research progress of biosensors based on long period fiber grating,” Chinese Optics, 2018, 11(3): 476-502.

[9] C. H. Liu, M. H. Hong, M. C. Lum, H. Flotow, F. Ghadessy, and J. B. Zhang, “Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching,” Applied Physics A, 2010, 101(2): 237-241.

[10] A. Retolaza, A. Juarros, J. Ramiro, and S. Merino, “Thermal roll to roll nanoimprint lithography for micro pillars fabrication on thermoplastics,” Microelectronic Engineering, 2018, 193: 54-61.

[11] Y. Kanamori, M. Okochi, and K. Hane, “Fabrication of antireflection subwavelength grating at tips of optical fibers using UV nanoimprint lithography,” Optics Express, 2013, 21(1): 322-328.

[12] Y. F. Chen, “Nanofabrication by electron beam lithography and its application: a review,” Microeletronic Engineering, 2015, 135: 57-72.

[13] N. L. Chiromawa and K. Lbrahim, “Fabrication of micro-array of Fresnel rings on Si by electron beam lithography and reactive ion etching,” Applied Physics A, 2016, 122(2): 122-129.

[14] K. L. Jim, C. W. Leung, and H. L. W. Chan, “Photonic crystal cavity embedded barium strontium titanate thin-film rib waveguide prepared by focused ion beam etching,” Thin Solid Films, 2010, 518(24): e101-e103.

[15] J. Liu, T. Jia, K. Zhou, D. Feng, S. Zhang, H. Zhang, et al., “Direct writing of 150 nm gratings and squares on ZnO crystal in water by using 800 nm femtosecond laser,” Optics Express, 2014, 22(26): 32361-32370.

[16] S. M. Jing, X. Y. Zhang, J. F. Liang, C. Chen, Z. M. Zheng, and Y. S. Yu, “Ultrashort fiber Bragg grating written by femtosecond laser and its sensing characteristics,” Chinese Optics, 2017, 10(4): 449-454.

[17] D. X. Liu, H. Xia, Y. L. Sun, Q. D. Chen, and W. F. Dong, “Femtosecond laser direct writing bio-gel template for in situ synthesis of nanoparticles,” Chinese Optics, 2014, 7(4): 608-615.

[18] J. Montoya, “Toward nano-accuracy in scanning beam interference lithography,” Ph.D. dissertation, Massachusetts Institute of Technology, Boston, USA, 2006.

[19] W. Wei, “Study on beam quality control of the scanning beam interference lithography system,” Ph.D. dissertation, University of Chinese Academy of Sciences, Beijing, China, 2017.

[20] P. T. Konkola, C. G. Chen, R. K. Heilmann, and M. L. Schattenburg, “Beam steering system and spatial filtering applied to interference lithography,” Journal Vacuum Science & Technology B, 2000, 18(6): 3282–3286.

[21] C. G. Chen, “Beam alignment and image metrology for scanning beam interference lithography: fabricating gratings with nanometer phase accuracy,” Ph.D. dissertation, Massachusetts Institute of Technology, USA, 2003.

[22] W. Wang, Bayanheshig, Y. Song, S. Jiang, and M. Z. Pan, “Beam alignment and convergence analysis of scanning beam interference lithography system,” Chinese Journal of Lasers, 2016, 43(12): 176-183.

[23] T. Kanai, A. Suda, S. Bohman, M. Kaku, S. Yamaguchi, and K. Midorikawa, “Pointing stabilization of a high-repetition-rate high power femtosecond laser for intense few-cycle pulse generation,” Applied Physics Letters, 2008, 92(6): 061106-1-061106-3.

[24] A. Stalmashonak, N. Zhavoronkov, I. V. Hertel, S. Vetrov, and K. Schmid, “Spatial control of femtosecond laser system output with submicroradian accuracy,” Applied Optics, 2006, 45(6): 1271–1274.

[25] Y. Song, W. Wang, S. Jiang, Bayanheshig, and N. Zhang. “Weighted iterative algorithm for beam alignment in scanning beam interference lithography,” Applied Optics, 2017, 56(31): 8669-8675.