Finite element analysis on the residual stress of thin film on components of deformable mirror

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 32 >Issue 8 >Page 28 > Article

Opto-Electronic Engineering
Vol. 32, Issue 8, 28 (2005)

Finite element analysis on the residual stress of thin film on components of deformable mirror

[in Chinese]^1、2, [in Chinese]¹, [in Chinese]¹, and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Finite element analysis on the residual stress of thin film on components of deformable mirror[J]. Opto-Electronic Engineering, 2005, 32(8): 28 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Finite element analysis on the residual stress of thin film on components of deformable mirror[J]. Opto-Electronic Engineering, 2005, 32(8): 28

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