• Infrared and Laser Engineering
  • Vol. 45, Issue 2, 206007 (2016)
[in Chinese]*, [in Chinese], and [in Chinese]
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    DOI: 10.3788/irla201645.0206007 Cite this Article
    [in Chinese], [in Chinese], [in Chinese]. Research on drilling hole of single crystal by pulse laser[J]. Infrared and Laser Engineering, 2016, 45(2): 206007 Copy Citation Text show less
    References

    [1] Tunna L, O′Neill W, Khan A, et al. Analysis of laser micro drilled holes through aluminium for micro-manufacturing applications[J]. Optics and Lasers in Engineering, 2005, 43(9): 937-950.

    [2] Burdet N, Brindi F, Carzino R, et al. Very large spot size effect in nanosecond laser drilling efficiency of silicon[J]. Optics Express, 2010, 18(22): 22488-22494.

    [3] Bulgakova N M, Evtushenko A B, Shukhov Y G, et al. Role of laser-induced plasma in ultradeep drilling of materials by nanosecond laser pulses[J]. Applied Surface Science, 2011, 257(24): 10876-10882.

    [4] Dan L, Duan-Ming Z. Vaporization and plasma shielding during high power nanosecond laser ablation of silicon[J]. Chinese Physics Letters, 2005, 25(4): 1368-1371.

    [5] Tan B. Deep micro hole drilling in a silicon substrate using multi-bursts of nanosecond UV laser pulses[J]. Journal of Micromechanics and Microengineering, 2006, 16(1): 109-112.

    [6] Liu Huixia, Yang Shengjun, Wang Xiao, et al. Experiment study and numerical simulation of pulsed laser ablation crater[J]. Chinese Journal of Lasers, 2009, 36(1): 220-223. (in Chinese)

    [7] Allman. Laser-beam Interactions with Materials Physical Principles and Applications[M]. Beijing: Science Press, 1994: 55. (in Chinese)

    [8] Tunna L, O′Neill W, Khan A, et al. Analysis of laser micro drilled holes through aluminium for micro-manufacturing applications[J]. Optics and Lasers in Engineering, 2005, 43(9): 937-950.

    [9] Chu Qingchen, Yu Gang, Lu Guoquan, et al. Two-dimensional numerical investigation for the effects of laser process parameters on hole type during laser drilling[J]. Chinese Journal of Lasers, 2011, 38(6): 1-6. (in Chinese)

    [10] Phipps C R, Turner T P, Harrison R F, et al. Impulse coupling to targets in vacuum by KrF, HF, and CO2 single-pulse lasers[J]. Journal of Applied Physics, 1988, 64(3): 1083.

    [11] Semak V V, Knorovsky G A, MacCallum D O, et al. Effect of surface tension on melt pool dynamics during laser pulse interaction[J]. Journal of Physics D: Applied Physics, 2006, 39(3): 590-595.

    [12] Konstantinos Salonitis, Aristidis Stournaras, George Tsoukantas, et al. A theoretical and experimental investigation on limitations of pulsed laser drilling[J]. Journal of Materials Processing Technology, 2007, 183(1): 96-103.

    [13] Zhou Jun, Tsai Hai-Lung, Wang Peichung. Transport phenomena and keyhole dynamics during pulsed laser welding[J]. Journal of Heat Transfer, 2006, 128(7): 680.

    [14] Zhang Duanming, Li Zhihua, Guan Li, et al. Kinetic Principle of Pulse Laser Deposition[M]. Beijing: Science Press, 2011: 45-64. (in Chinese)

    [15] Herman P R, Breitling D, Ruf A, et al. Fundamental aspects in machining of metals with short and ultrashort laser pulses[C]//SPIE, 2004, 5339: 49-63.

    [16] Chan C L, Mazumder J, Chen M M. Effect of surface tension gradient driven convection in a laser melt pool: Three-dimensional perturbation model[J]. Journal of Applied Physics, 1988, 64(11): 6166.

    [in Chinese], [in Chinese], [in Chinese]. Research on drilling hole of single crystal by pulse laser[J]. Infrared and Laser Engineering, 2016, 45(2): 206007
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