Qian Bai, Yubang Zhang, Mingyong Hu, Zhiwei Feng, Jianfeng Xu, Guangyu Chen, Jinlong Cui. Research on Detection of High-Order Aspheric Surfaces Using Double Spherical Reflection Compensation[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0722002
- Laser & Optoelectronics Progress
- Vol. 60, Issue 7, 0722002 (2023)
Fig. 1. Three-dimensional surface of high-order aspheric
Fig. 2. Aspheric gradient curve
Fig. 3. Normal aberration curve
Fig. 4. Compensation detection optical path
Fig. 5. Wavefront diagram of initial detection system
Fig. 6. Light path diagram of compensation detection system
Fig. 7. Wavefront diagram of compensation detection system
Fig. 8. Spot diagram of compensation detection system
Fig. 9. Light trace diagram of compensation detection system
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Table 1. Structural data of initial system
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Table 2. Structural data of compensation detection system
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Table 3. Manufacturing tolerance parameters
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