Fig. 1. SEM images of microlens arrays fabricated by multiple foci^[1]. (a) Microlens arrays in triangle distribution; (b) partial view of one microlens in Fig. (a) captured at 45°; (c) microlens arrays in hexagonal distribution; (d) microlens arrays in 4×4 distribution

Fig. 2. Multiple foci integration of different microfilters inside the microchannel and dependence of the hole size formed in the filters on the laser power^[3]. (a)(b) Schematic illustrations of five foci and seven foci integration of microfilter; (c)(d) SEM images of the microfilters integrated in the microchannel by using five foci and seven foci, respectively; (e) dependence of the hole size formed in the filter on the laser power

Fig. 3. SEM image of sine curve structures fabricated with three focus spots^[5]

Fig. 4. SEM image of microstructure on the surface of silicon by multi beams interference^[7]

Fig. 5. Experimental setup for fabricating nanowire^[9]

Fig. 6. Experimental results. (a) Surface structures fabricated by three-beam interference; (b) four-beam interference^[11]

Fig. 7. Femtosecond laser holographic processing system^[12]

Fig. 8. 3D microlens array^[13]

Fig. 9. Schematic of bifocal lens preparation process ^[14]

Fig. 10. Femtosecond laser reflected from the SLM was modulated to circle/square/triangular plane and then focused into the photoresist for two-photon polymerization^[17]

Fig. 11. Schematic diagram of line-shape beam and peeling^[18]. (a) Phase distribution of holographic cylindrical lens; (b) its optical reconstruction; (c) line-shaped laser peeling of ITO membrane on glass substrate

Fig. 12. SEM image of processing result with continuous intensity distribution^[19]

Fig. 13. Hydrogel cell scaffold fabricated by Bessel beam^[20]

Fig. 14. 3D slant microtubes and flower-like microtube arrays fabricated by tilted the Bessel beam scanning^[21]

Fig. 15. Dynamic holographic processing of various diameter-varying microtubes^[22]. (a) Dependence of different types of microstructures on topological charge and axicon radius; (b)(c) study on the outside diameter and the inside diameter of the single-ring microstructures as a function of axicon radius and topological charge; (d) schematic illustration of the holographic processing of a microtube array; (e) SEM of straight microtube arrays; (f) conical m

Fig. 16. Method of creating gap ring shaped light field^[23]. (a) Femtosecond gap ring shaped beam is generated by phase modulation using a predesigned hologram loaded in the SLM; (b) simulation of focused light field using Fresnel diffraction; (c) illustration of the computer-generated holograms (CGHs)

Fig. 17. Phase and cross-section intensity profiles at 5, 10, 15, 20, 25, and 30 cm from the SLM for the three types of beams^[25]. (a) Bessel beam (2° cone angle); (b) Bessel-like beam, R=+9×10⁵, and R=-3×10⁵

Fig. 18. Comparison of groove scribing with zero-order and 1+(-1) superposed Bessel beams^[26]. (a)(c)Calculated beam shapes; (b)(d) atomic force microscope images of grooves scribed with corresponding beams; (e)comparison of intensities integrated along the scanning direction between two cases

Fig. 19. Curved structure were processed by Airy beam with different focuses^[27]

Fig. 20. Various kinds of 3D microcages fabrication with the dynamic holographic processing technique^[28]

Fig. 21. SEM images of polymerized double-helix microstructures^[31]. (a) Double-helix microstructure array; (b)(c)top and side view of a single double-helix microstructure

Fig. 22. Photoreduction of silver double helix with double-helix beam^[32]. (a) Double-helix focal intensity distribution; (b) SEM images of an array of silver double helix.; (c) measured transmittances of the double-helix silver array for left circular polarization and right circular polarization light at normal incidence

Fig. 23. Linear polarization directions change with positions in the line-shape beam^[40]

Fig. 24. Generations of cylindrical vector beams^[41]. (a)-(c) Radial polarization beam; (d)-(f) azimuth polarization beam; (g)-(i) windmill polarization beam. From the left to right, two CGHs for the wavefront and polarization modulations, the optical reconstruction, and the SEM images of fabricated structure

Fig. 25. Effects of different grating cycles on the quality of optical field and the shape of processing^[47]

Fig. 26. Experimental results. (a)(b)Optical intensity simulations of single-CGH at the focal plane and defocused plane; (c)optical intensity distribution at the defocused plane of 20 CGHs; (d)plot of optical uniformity as a function of number of CGHs (black square) and defocused position (red circle) ^[44]

Table 1. Generation of linear, circular, radial, and angular polarized light^[36]