A New Design of Normal Incidence Scanning Reflectometer

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 14 >Issue 5 >Page 539 > Article

Acta Optica Sinica
Vol. 14, Issue 5, 539 (1994)

A New Design of Normal Incidence Scanning Reflectometer

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A New Design of Normal Incidence Scanning Reflectometer[J]. Acta Optica Sinica, 1994, 14(5): 539 Copy Citation Text

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Abstract

A new type of the normal incidence scanning reflectometer, in which a M-type prism is used to split light beam, has been designed and constructed. The incident angle is about 5° and the photon energy region is from 1.5 to 3.5 eV. The measurement is controlled automatically by a computer. The measureing precision is about 0.01.

Keywords

refractive index spectrum prism optical constant

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A New Design of Normal Incidence Scanning Reflectometer[J]. Acta Optica Sinica, 1994, 14(5): 539

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