[1] Yan Bin, Yuan Weizheng, Yu Yiting et al.. Fabrication and experimental investigation of diffraction characteristics for a pitch-tunable grating based on SOG process［J］. Acta Optica Sinica, 2010, 11(30): 3128～3132

[2] Yuan Ye, Zou Yongzhuo, Bao Junfeng et al.. A novel variable optical attenuator based on micro-electromechanical system (MEMS) ［J］. Acta Optica Sinica, 2004, 24(3): 364～368

[3] Yu Yiting, Yuan Weizheng, Wang Lanlan et al.. Theoretical analys is and experiment al measurement on the maximum blazing angle for micro programmable gratings [J]. Acta Optica Sinica, 2008, 28(11): 2220～2224

[4] Zhang Jie, Huang Shanglian, Zhang Zhihai et al.. Experiments and structural optimization of micro-electro-mechanical system-based grating moving light modulator［J］. Acta Optica Sinica, 2007, 27(9): 1565～1569

[5] Ke-Min Liao, Yi-Chih Wang, Chih-Hsien Yeh et al.. Closed-loop adaptive control for torsional micromirrors［C］. SPIE, 2004, 5346: 184～192

[6] Veljko Milanovie. Laterally actuated torsional micromirrors for large static deflection ［C］. IEEE Photonics Technology Letters, 2003, 15(2): 245～247

[7] R. Conant, J. Nee, K. Lau et al.. A flat high-frequency scanning micromirror［C］. 2000 Solid-State Sensor and Actuator Workshop, 2000, 6～9

[8] C. Tsou, W. T. Lin, C. C. Fan et al.. A novel self-aligned vertical electrostatic combdrives actuator for scanning micromirrors［J］. J. Micromech. Microeng., 2005, 15(4): 855～860

[9] Liu Bingzheng, Peng Jianhua. Nonlinear Dynamics［M］. Beijing: High Education Press, 2004

[10] H. Urey, C. Kan, W. O. Davis. Vibration mode frequency formulae for micromechanical scanners［J］. J. Micromech. Microeng, 2005, 15(9): 1713～1721

[11] F. Filhol, E. Defay, C. Divoux et al.. Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning［J］. Sens. Actuators A: Phys., 2005, 123-124(9): 483～489

[12] Leng Changlin. MEMS Motion Measurements Based on Laser Doppler Technology［D］. Tianjin: Tianjin University, 2006. 9～12