Fig. 1. MEMS quasi-static micromirror. (a) Front; (b) Back

Fig. 2. (a) Static characterization of the MEMS quasi-static micromirror; (b) Dynamic characterization of the MEMS quasi-static micromirror

Fig. 3. Schematic diagrams of two types of wide-angle optical paths. (a) Galilean wide-angle; (b) Keplerian wide-angle

Fig. 4. Design process of wide-angle optical path

Fig. 5. (a) Wide-angle lenses optical path diagram; (b) Spot diagram for different incident fields of view; (c) Distortion mesh in 2° incident field of view

Fig. 6. Schematic section for mounting the wide-angle lenses

Fig. 7. (a) Beam deflection before angle expansion; (b) Beam deflection after angle expansion

Fig. 8. Experimental setup for testing wide-angle linearity. (a) Before angle expansion; (b) After angle expansion

Fig. 9. Experimental setup for laser scanning wide-angle verification. (a) Before angle expansion; (b) After angle expansion

Fig. 10. Intensity distribution after laser collimation. (a) Two-dimensional light intensity distribution; (b) One-dimensional light intensity distribution and Gaussian fitting

Fig. 11. Intensity distribution of the laser light after the wide-angle lens. (a) Two-dimensional light intensity distribution; (b) One-dimensional light intensity distribution and Gaussian fitting

Fig. 12. Schematic diagram of deflection angle calculation. (a) Before angle expansion; (b) After angle expansion

Fig. 13. Experimental results of angle expansion magnification

Fig. 14. Experimental characterization results of angle spreading linearity

Fig. 15. Demonstration of the wide-angle lenses. (a) Laser spot before angle expansion; (b) Laser spot after angle expansion; (c) Line-scan pattern before angle expansion; (d) Line-scan pattern after angle expansion; (e) Lissajous scanning pattern before angle expansion; (f) Lissajous scanning pattern after angle expansion

Table 1. Performance of MEMS quasi-static micromirror

Table 2. Simulation results of different wide-angle lenses

Table 3. Zemax design parameters of wide-angle lenses

Table 4. Laser beam quality analysis results before and after angle expansion