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    Journals >Laser & Optoelectronics Progress >Volume 54 >Issue 6 >Page 61401 > Article
    • Laser & Optoelectronics Progress
    • Vol. 54, Issue 6, 61401 (2017)
    Thermal Effect Simulation Analysis on Excimer Laser Annealing of Zinc Oxide Thin Films
    Shao Jingzhen1、*, Wang Xi2, Hu Hongtao1, and Fang Xiaodong1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop54.061401 Cite this Article Set citation alerts
    Shao Jingzhen, Wang Xi, Hu Hongtao, Fang Xiaodong. Thermal Effect Simulation Analysis on Excimer Laser Annealing of Zinc Oxide Thin Films[J]. Laser & Optoelectronics Progress, 2017, 54(6): 61401 Copy Citation Text show less
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    Shao Jingzhen, Wang Xi, Hu Hongtao, Fang Xiaodong. Thermal Effect Simulation Analysis on Excimer Laser Annealing of Zinc Oxide Thin Films[J]. Laser & Optoelectronics Progress, 2017, 54(6): 61401
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