Author Affiliations
Key Laboratory of Photonic Information Technology, Ministry of Industry and Information Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, Chinashow less
Fig. 1. Schematic diagram of interference based on Fabry-Perot sensor
Fig. 2. Orthogonal working point and linear interval
[24] Fig. 3. Static working point stabilization system
[1] Fig. 4. Schematic diagram of EFPI sensor system based on PGC demodulation principle
Fig. 5. Schematic diagram of PMDI-PGC demodulation system
[26] Fig. 6. Schematic diagram of PGC-AD-DSM demodulation algorithm
[27] Fig. 7. Schematic diagram of symmetrical demodulation method based on 3×3 coupler
[1] Fig. 8. Experimental setup for interrogating an EFPI by using a three-wavelength method
[29] Fig. 9. Dual-wavelength passive quadrature demodulation system
[30] Fig. 10. Schematic diagram of dual-wavelength orthogonal demodulation algorithm
Fig. 11. Schematic diagram of dual-wavelength quadrature phase compensation demodulation algorithm
Fig. 12. Schematic diagram of dual-wavelength direct current compensation laser interference demodulation algorithm
Fig. 13. Experimental results of the EFPI with a cavity length of 129.946 μm at 1 kHz
[34] Fig. 14. Schematic diagram of three-wavelength passive demodulation laser interference system
[35] Fig. 15. Schematic diagram of three-wavelength passive demodulation laser interference algorithm
Fig. 16. Schematic diagram of experimental results of three-wavelength passive demodulation laser interference
[35] Fig. 17. Schematic diagram of phase shift demodulation algorithm
Fig. 18. Schematic diagram of the experimental results of phase-shift demodulation
[37] Fig. 19. Schematic diagram of three-wavelength symmetric demodulation algorithm
Fig. 20. Demodulation results. (a) Output signal when the cavity length is changed from 301.252 μm to 264.427 μm; (b)‒(d) enlarged images of areas indicated by the solid boxes in Fig. 20(a)
[38] Demodulation method | Demodulation condition | Demodulation idea | Solved problem |
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Dual-wavelength DC compensation laser interferometry | EFPI cavity length and source wavelength are known | DC compensation,phase compensation, signal recovery | Dual-wavelength demodulation method can be used to interrogate EFPIs with any cavity length and any phase modulation | Three-wavelength passive demodulation laser interferometry | EFPI cavity length and source wavelength are known | DC compensation,phase compensation, signal recovery | DC component is compensated online, the EFPI demodulation with any cavity length and any phase modulation can be realized | Three-wavelength phase shift demodulation laser interferometry | EFPI cavity length and source wavelength are known | Interferometric signal,tangent of the signal,signal recovery | DC and phase compensation are eliminated directly; the EFPI demodulation with any cavity length and any phase modulation can be realized | Three-wavelength symmetric demodulation laser interferometry | Two interferometric signals are symmetrical about the third interferometric signal | Interferometric signal,tangent of the signal,signal recovery | Under the condition of unknown cavity length, it can be used to interrogate EFPIs with any cavity length and any phase modulation |
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Table 1. Comparison of four different demodulation methods