• Photonics Research
  • Vol. 11, Issue 10, 1606 (2023)
Shaoteng Wu1、2、5、*, Lin Zhang1, Rongqiao Wan1、6、*, Hao Zhou1, Kwang Hong Lee1, Qimiao Chen1、7、*, Yi-Chiau Huang3, Xiao Gong4, and Chuan Seng Tan1
Author Affiliations
  • 1School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
  • 2State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 3Applied Materials, Inc., Sunnyvale, California 95054, USA
  • 4Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
  • 5e-mail: shaoteng.wu@ntu.edu.sg
  • 6e-mail: rongqiao.wan@ntu.edu.sg
  • 7e-mail: chenqm@ntu.edu.sg
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    DOI: 10.1364/PRJ.491763 Cite this Article Set citation alerts
    Shaoteng Wu, Lin Zhang, Rongqiao Wan, Hao Zhou, Kwang Hong Lee, Qimiao Chen, Yi-Chiau Huang, Xiao Gong, Chuan Seng Tan. Ge0.92Sn0.08/Ge multi-quantum-well LEDs operated at 2-μm-wavelength on a 12-inch Si substrate[J]. Photonics Research, 2023, 11(10): 1606 Copy Citation Text show less

    Abstract

    The development of an efficient group-IV light source that is compatible with the CMOS process remains a significant goal in Si-based photonics. Recently, the GeSn alloy has been identified as a promising candidate for realizing Si-based light sources. However, previous research suffered from a small wafer size, limiting the throughput and yield. To overcome this challenge, we report the successful growth of GeSn/Ge multiple-quantum-well (MQW) p-i-n LEDs on a 12-inch (300-mm) Si substrate. To the best of our knowledge, this represents the first report of semiconductor LEDs grown on such a large substrate. The MQW LED epitaxial layer is deposited on a 12-inch (300-mm) (001)-oriented intrinsic Si substrate using commercial reduced pressure chemical vapor deposition. To mitigate the detrimental effects of threading dislocation densities on luminescence, the GeSn/Ge is grown pseudomorphically. Owing to the high crystal quality and more directness in the bandgap, enhanced electroluminescence (EL) integrated intensity of 27.58 times is demonstrated compared to the Ge LED. The MQW LEDs exhibit EL emission near 2 μm over a wide operating temperature range of 300 to 450 K, indicating high-temperature stability. This work shows that GeSn/Ge MQW emitters are potential group-IV light sources for large-scale manufacturing.
    h28π2m*(z)2ψnz2+V(z)ψn=Enψn,

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    Shaoteng Wu, Lin Zhang, Rongqiao Wan, Hao Zhou, Kwang Hong Lee, Qimiao Chen, Yi-Chiau Huang, Xiao Gong, Chuan Seng Tan. Ge0.92Sn0.08/Ge multi-quantum-well LEDs operated at 2-μm-wavelength on a 12-inch Si substrate[J]. Photonics Research, 2023, 11(10): 1606
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