• Acta Optica Sinica
  • Vol. 21, Issue 7, 853 (2001)
[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Super-Resolution in 3-D Confocal Surface Profilometry[J]. Acta Optica Sinica, 2001, 21(7): 853 Copy Citation Text show less

    Abstract

    Based on super-resolution theory, the 3-D confocal surface profilometry and annular pupil filter are combined for analyzing the property of the 3-D profilometry. The results of computer simulation and experiment prove that this method can explore the axial dynamic range and improve transversal resolution of 3-D profilometry at decreasing axial resolution.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Super-Resolution in 3-D Confocal Surface Profilometry[J]. Acta Optica Sinica, 2001, 21(7): 853
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