In order to realize the automatic acquisition of excimer laser induced breakdown spectrum (LIBS) and the convenient processing of spectral data, the whole system is programmed in modules by adopting LabVIEW actor framework, and a full-automatic real-time acquisition system of spectral data is successfully developed. The performance of the software has been tested on the experimental platform of excimer LIBS for elemental imaging of biological tissues. During the operation of the excimer LIBS experimental system at 3 Hz, the program didn’t appear the phenomenon such as jam, crash, data loss, and the correct element distribution map was obtained by processing the data automatically, which shows that the developed software meets the requirements of LIBS system in data acquisition, storage and processing speed.