Normal-Incidence Mo/B4C Soft X-Ray Multilayer

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 18 >Issue 1 >Page 109 > Article

Acta Optica Sinica
Vol. 18, Issue 1, 109 (1998)

Normal-Incidence Mo/B₄C Soft X-Ray Multilayer

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Normal-Incidence Mo/B₄C Soft X-Ray Multilayer[J]. Acta Optica Sinica, 1998, 18(1): 109 Copy Citation Text

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Abstract

The preliminary results of making Mo/B4C multilayer mirrors at wavelength below 10.0 nm are presented. The multilayer structure was calculated at designed wavelength (λ=8.0 nm), and the sample mirror were deposited by magnetron sputtering technique.

Keywords

Mo/B4C multilayer normal incidence soft X-ray