The Optimization of Processes for Si Based GeSi Alloy Optical Waveguides

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 16 >Issue 5 >Page 688 > Article

Acta Optica Sinica
Vol. 16, Issue 5, 688 (1996)

The Optimization of Processes for Si Based GeSi Alloy Optical Waveguides

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Optimization of Processes for Si Based GeSi Alloy Optical Waveguides[J]. Acta Optica Sinica, 1996, 16(5): 688 Copy Citation Text

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Optimization of Processes for Si Based GeSi Alloy Optical Waveguides[J]. Acta Optica Sinica, 1996, 16(5): 688

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