Author Affiliations
College of Electrical Engineering, North China University of Science and Technology, Tangshan, Hebei 063210, Chinashow less
Fig. 1. Spot diameter corresponding to different ablation power. (a) Ablated sequence spots; (b) relationship curve
Fig. 2. Spot images processed by different methods. (a) Original image; (b) grayscale transformation method; (c) histogram equalization method; (d) PCA method
Fig. 3. Pseudo-color image and its graying. (a) Pseudo-color image; (b) grayscale image
Fig. 4. L component. (a) L component of original image; (b) L component after mask processing
Fig. 5. Average gray curves of L component of original spot image and spot image after mask processing. (a) Original spot image; (b) spot image after mask processing
Fig. 6. Average gray characteristic curve of sample
Fig. 7. Average gray characteristic curves before and after fractal interpolation. (a) Before fractal interpolation; (b) after fractal interpolation
Fig. 8. Average gray characteristic curves obtained by combining fractal interpolation with wavelet transformation. (a) With fractal interpolation; (b) combing fractal interpolation with wavelet transformation
Fig. 9. Average gray characteristic curves before and after wavelet transformation. (a) Before wavelet transformation; (b) after wavelet transformation
Fig. 10. Laser ablation experiment of monocrystalline silicon
Fig. 11. Average gray characteristic curve of spot images under different power
Fig. 12. Correlation curve of grayscale and power
Fig. 13. Average gray characteristic curve in a cycle of processing
No. | Ablationpower /mW | Feedrate /μm | Processingspeed /(mm·s-1) | Averageslotdepth /μm |
---|
1 | 10 | 2 | 0.4 | 94 | 2 | 10 | 2 | 1.2 | 54 | 3 | 10 | 6 | 0.4 | 86 | 4 | 10 | 6 | 1.2 | 13.8 | 5 | 50 | 2 | 0.4 | 171 | 6 | 50 | 2 | 1.2 | 61 | 7 | 50 | 6 | 0.4 | 171 | 8 | 50 | 6 | 1.2 | 50 | 9 | 10 | 4 | 0.8 | 23 | 10 | 50 | 4 | 0.8 | 108 |
|
Table 1. Ablation experimental parameters of silicon microchannels