Moisture absorption characteristics of a SiO2 film from 2 to 3 μm

Yun Cui; Hao Li; Kui Yi; Jianda Shao

doi:10.3788/COL201513.023101

Journals >Chinese Optics Letters >Volume 13 >Issue 2 >Page 023101 > Article

Chinese Optics Letters
Vol. 13, Issue 2, 023101 (2015)

Moisture absorption characteristics of a SiO₂ film from 2 to 3 μm

Yun Cui^*, Hao Li, Kui Yi, and Jianda Shao

Author Affiliations

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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DOI: 10.3788/COL201513.023101 Cite this Article Set citation alerts

Yun Cui, Hao Li, Kui Yi, Jianda Shao. Moisture absorption characteristics of a SiO₂ film from 2 to 3 μm[J]. Chinese Optics Letters, 2015, 13(2): 023101 Copy Citation Text

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Fig. 1. Variations in the FTIR spectra of SiO2 coatings deposited by IBS as a function of heating temperature.

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Fig. 2. Variations in the FTIR spectra of SiO2 coatings deposited by EBE as a function of heating temperature.

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Fig. 3. Surface structures of the different substrates.

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Fig. 4. Surface structures of coatings deposited by IBS on different substrates.

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Fig. 5. Scanning electron microscopy (SEM) cross sectional morphology of a coating fabricated by IBS.

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Fig. 6. Surface structures of SiO2 coatings deposited by EBE on different substrates.

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Fig. 7. SEM cross sectional morphology of a coating fabricated by EBE.

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Fig. 8. Mean pore sizes of the SiO2 coatings prepared by EBE on different substrates.

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Deposition Method	Coating Material	Substrate	Baking Temperature (°C)	Base Pressure (Pa)	$O_{2}$ Pressure (Pa)	Thickness (μm)
EBE	${SiO}_{2}$	Fused quartz, silicon crystal, and alumina crystal	300	$5 \times 10^{- 3}$	$1 \times 10^{- 2}$	2
IBS	${SiO}_{2}$	Fused quartz, silicon crystal, and alumina crystal	70	$1 \times 10^{- 4}$	$4 \times 10^{- 2}$	2

Table 1. Parameters of the Coating Process

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Sample	Wavenumber ( ${cm}^{- 1}$ )	Wavelength (μm)	Vibration Mode	References
Water	3280	3.05	Stretching OH Symmetric, $ν 1$	[9]
	3490	2.86	Stretching OH Asymmetric, $ν 3$
Solid phase of water	3200	3.13	OH stretching of ice structure	[10]
Liquid phase of water	3400	2.94	OH stretching of liquid $H_{2} O$ structure
Mesoporous silica	3400	2.94	OH in free $H_{2} O$	[11]
	3672	2.72	OH in Si-OH
Mesoporous silicon oxide	3230	3.10	OH stretching of ice-like structure	[12]
	3400	2.94	OH stretching of liquid $H_{2} O$ structure

Table 2. Water Vibrations in the Mid-Infrared Spectral Region

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Material	Coefficient of Thermal Expansion ( $10^{- 6} K$ )	References
Fused quartz	0.5	[17]
Silicon crystal	3.6	[18]
Alumina crystal	7.3–8.1	[18]
${SiO}_{2}$ coating prepared by EBE	0.4	[19]

Table 3. Coefficients of Thermal Expansion of the Substrates and Coating

Yun Cui, Hao Li, Kui Yi, Jianda Shao. Moisture absorption characteristics of a SiO₂ film from 2 to 3 μm[J]. Chinese Optics Letters, 2015, 13(2): 023101

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