The new development in silicon optical integration, and the design andprocesses of fabricating GeSi/Si single-mode rib waveguide at the wavelength λ=1.3 μm is reported. The propagating loss of the waveguide has reached 0.7 dB/cm. The heightand width of the waveguide are 4～8 μm and 8～12 μm respectively. The size of themare comparable to those of single-mode fibre cores. Besides, the numerical aperture of thewaveguide at the ends are also matched to the fibre. The fabricated waveguide meets allthe demands of silicon optical integration. Finally, the single mode outputs from a Y-power-divider prepared by the GeSi-Si rib waveguides discribed above is shown.