Design Optimization and Fabrication of the Focal Plane Array Reflector

Mao Liang; Shi Haitao; Cheng Teng; Ou Yi; Chen Dapeng; Zhang Qingchuan

doi:10.3788/aos201333.0111001

[1] Y. Zhao, M. Mao, R. Horowitz et al.. Optomechanical uncooled infrared imaging system: design, microfabrication, and performance ［J］. Microelectromechanical Systems, 2002, 11(2): 136～146

[2] T. Ishizuya, J. Suzuki, K. Akagawa et al.. Optically readable bi-material infrared detector [C]. SPIE, 2001, 4369: 342～349

[3] L. Senesac, J. Corbeil, S. Rajic et al.. IR imaging using uncooled microcantilever detectors ［J］. Ultramicroscopy, 2003, 97(1-4): 451～458

[4] C. Li, B. Jiao, S. Shi et al.. A novel uncooled substrate-free optical-readable infrared detector: design, fabrication and performance ［J］. Measurement Science and Technology, 2006, 17(7): 1981～1986

[5] Dong Fengliang, Zhang Qingchuan, Wu Xiaoping et al.. Bimaterial micro-cantilever uncooled infrared imaging system-design and fabrication of microcantilever array［J］. J. Infrared Millim. Waves, 2005, 24(6): 409～413

[6] Z. Miao, Q. Zhang, Z. Guo et al.. Optical readout method for microcantilever array sensing and its sensitivity analysis ［J］. Opt. Lett., 2007, 32(6): 594～596

[7] H. Shi, Q. Zhang, J. Qian et al.. Optical sensitivity analysis of deformed mirrors for microcantilever array IR imaging ［J］. Opt. Express, 2009, 17(6): 4367～4381

[8] Cheng Teng, Zhang Qingchuan, Gao Jie et al.. Analysis of optical readout sensitivity for uncooled infrared imaging based on optical readout［J］. Acta Optica Sinica, 2012, 32(2): 0204002

[9] J. W. Goodman. Introduction to Fourier Optics [M]. Roberts & Company Publishers, 2005