• Infrared and Laser Engineering
  • Vol. 51, Issue 5, 20210512 (2022)
Yonggang Pan1, Sibao Zhang2, Zheng Liu2, Wencheng Liu2, Mian Li2, Chunjuan Zhang2, and Changxin Luo2
Author Affiliations
  • 11.Zhongshan Institute of Changchun University of Science and Techbology, Zhongshan 528437, China
  • 2Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China
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    DOI: 10.3788/IRLA20210512 Cite this Article
    Yonggang Pan, Sibao Zhang, Zheng Liu, Wencheng Liu, Mian Li, Chunjuan Zhang, Changxin Luo. Design and fabrication of polarization and phase modulated beam splitter[J]. Infrared and Laser Engineering, 2022, 51(5): 20210512 Copy Citation Text show less
    Structure diagram of beam splitter structure
    Fig. 1. Structure diagram of beam splitter structure
    Spectral transmittance curve
    Fig. 2. Spectral transmittance curve
    Spectral reflectance curve
    Fig. 3. Spectral reflectance curve
    Transmission phase
    Fig. 4. Transmission phase
    Reflection phase
    Fig. 5. Reflection phase
    Spectral transmittance curve of differnt incident angles
    Fig. 6. Spectral transmittance curve of differnt incident angles
    Spectral reflectance curve of differnt incident angles
    Fig. 7. Spectral reflectance curve of differnt incident angles
    Sample picture
    Fig. 8. Sample picture
    Measured spectral transmittance curve
    Fig. 9. Measured spectral transmittance curve
    Measured spectral reflectance curve
    Fig. 10. Measured spectral reflectance curve
    Schematic diagram of extinction ratio measurement principle
    Fig. 11. Schematic diagram of extinction ratio measurement principle
    Average T:R@1500-1600 nm (8±2)∶(92 $ \mp 2 $
    $\left|{{T} }_{s}-{{T} }_{p}\right|$ and $\left|{{R} }_{s}-{{R} }_{p}\right|$≤3%
    $ \left|{\Delta }_{t}\right| $@1530 nm, 1540 nm, 1550 nm, 1560 nm ≤7°
    $ \left|{\Delta }_{r}\right| $@1530 nm, 1540 nm, 1550 nm, 1560 nm ≤10°
    Table 1. Technical requirements of beam splitter
    MaterialRate/nm·s−1EB oxygenation/sccmAPS
    Bias voltage/VDischarged current/A
    Al2O30.3010045
    Ag103020
    Ta2O50.33513050
    SiO20.81016055
    Table 2. Preparation process parameters
    λ/nm Imax/mW Imin/mW ER$ \mathrm{\delta } $/(°)
    TRTRTRTR
    1 5300.434.240.402×10−37.323×10−31 070:1579:13.54.76
    1 5400.414.310.502×10−311.402×10−3817:1378:14.015.89
    1 5500.404.370.593×10−316.125×10−3675:1271:14.416.95
    1 5600.384.430.731×10−321.931×10−3520:1202:15.028.05
    Table 3. Extinction ratio and phase difference date
    Test itemsResults
    Adhesion testPass
    Soaking testPass
    Heat and humidity testPass
    Alternating high and low temperature test humidity and temperature Pass
    Table 4. Reliability results of beam splitter
    Yonggang Pan, Sibao Zhang, Zheng Liu, Wencheng Liu, Mian Li, Chunjuan Zhang, Changxin Luo. Design and fabrication of polarization and phase modulated beam splitter[J]. Infrared and Laser Engineering, 2022, 51(5): 20210512
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