• Chinese Optics Letters
  • Vol. 13, Issue Suppl., S21401 (2015)
Guojun He1、2, Lihua Huang1、*, Liying Hou1, and Huijie Huang1
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • show less
    DOI: 10.3788/COL201513.S21401 Cite this Article Set citation alerts
    Guojun He, Lihua Huang, Liying Hou, Huijie Huang. Study of beam steering based on feedback control via a pulsed laser[J]. Chinese Optics Letters, 2015, 13(Suppl.): S21401 Copy Citation Text show less

    Abstract

    We set up a pulsed beam steering system with a simple feedback control method. The system applies an integration circuit to process a 2 μs short pulsed beam with a repetition rate of 25 Hz, and employs an iteration method to correct the beam with a reasonable feedback gain factor. The beam steering system achieves a performance of 30 μm position accuracy and 30 μrad pointing accuracy, and it can not only compensate the drift of the laser source but also correct the external disturbance. The design can be directly applied as a lithography tool.
    Op(n,1)=0,(1.1)

    View in Article

    Oa(n,1)=(d2d1)n1(Δθ+Δpd1),(1.2)

    View in Article

    Op(n,2)=(d2d1)n1(d2Δθ+d2Δpd1),(1.3)

    View in Article

    Oa(n,2)=0,(1.4)

    View in Article

    y(t)=x(t)+V(t)/Vp,(2.1)

    View in Article

    V(t)=V(ttd)+γδ(ttd),(2.2)

    View in Article

    δ(t)=y(t)Vp.(2.3)

    View in Article

    T(ω)=Y(ω)X(ω)=1eiωtd1+(γ1)eiωtd,(3)

    View in Article

    Guojun He, Lihua Huang, Liying Hou, Huijie Huang. Study of beam steering based on feedback control via a pulsed laser[J]. Chinese Optics Letters, 2015, 13(Suppl.): S21401
    Download Citation