Bing Peng, Aihuan Dun, Lunzhe Wu, Zhe Wang, Xueke Xu. Variable Removal Function in Atmospheric Pressure Plasma Polishing[J]. Chinese Journal of Lasers, 2021, 48(24): 2403002
- Chinese Journal of Lasers
- Vol. 48, Issue 24, 2403002 (2021)
Fig. 1. Experimental setup of APPP system
Fig. 2. APPP process
Fig. 3. APPP removal function
Fig. 4. Experimental diagram of several group of removal functions
Fig. 5. MRR versus processing speed
Fig. 6. Real map of element surface temperature during processing
Fig. 7. Experimental diagrams of influence of sediment on subsequent processing. (a) Gradually increasing sediment on element surface; (b) experimental path of removal function
Fig. 8. Experimental results for influence of sediment on subsequent processing
Fig. 9. Fitting curve of variable removal function. (a) A; (b) C
Fig. 10. Influences of experimental variables on removal function. (a) Flow rate of He; (b) flow rate of CF4; (c) flow rate of O2; (d) power
Fig. 11. Comparison of single removal function before and after processing
Fig. 12. Comparison of variable removal function before and after processing
Fig. 13. PSD results before and after processing
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Table 1. Specifications of experimental parameters
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