In order to provide the test analysis technology to support the technology development of China high-purity quartz, taking the 4N high-purity quartz made by ourself as experimental samples, we studied the ICP detection technology for the quality of high-purity quartz. The results showed that the digestion and soluble ore is the key of the ICP detection technology for the quality of high-purity quartz. The ICP detection results of high-purity quartz are influenced by the factors including sample weight, reagent combination, reagent consumption and reagent purity. The optimal condition is that: the sample weight is ≥2　000 mg; reagent combination is HF+HNO3; reagent purity is high purity level(MOS or BV-Ⅲ); HF dosage is 25 mL; concentrated HNO3 are used by three times, and the total amount is ≥5 mL. In addition, the samples are not screened by steel sieve in order to avoid iron pollution. And the high-purity quartz should be dissolved in the super-clean laboratory, which may be good for reducing the detection error.