Daigao Chen, Hongguang Zhang, Min Liu, Xiao Hu, Yuguang Zhang, Dingyi Wu, Peiqi Zhou, Siyao Chang, Lei Wang, Xi Xiao, "67 GHz light-trapping-structure germanium photodetector supporting 240 Gb/s PAM-4 transmission," Photonics Res. 10, 2165 (2022)
- Photonics Research
- Vol. 10, Issue 9, 2165 (2022)
Fig. 1. Schematic of the light-trapping-structure Ge PD: (a) 3D view, (b) top view, and (c) side view along the incident direction; (b) and (c) hide all metal layers. Doping is not shown.
Fig. 2. Field distributions at different wavelengths in the proposed PD. (a)–(d) Distributions in silicon layer and (e)–(h) distributions in germanium layer.
Fig. 3. Calculated responsivity of the circular Ge PD.
Fig. 4. Optical micrograph of the fabricated circular Ge PD.
Fig. 5. (a) Dark current versus voltage and (b) normalized responsivity at different wavelengths.
Fig. 6. Normalized frequency response of the proposed Ge PD.
Fig. 7. (a) Experiment setup of high-speed PAM-4 signal transmission system and (b) BTB eye diagram of 80, 90, 100, and 105 GBaud PAM-4 signals.
Fig. 8. (a) BER versus different bit rates with BTB, 1 km, and 2 km transmissions; (b) BTB BER of 200 Gb/s PAM-4 versus different optical power.
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Table 1. Performance Comparison between Proposed PD and Other Works
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