Kai LIAO, Wenjun WANG, Xuesong MEI, Bin LIU. Femtosecond Laser Single-pass High Quality Direct Cutting Thin Quartz Glass Process Based on Filament Effect（Invited）[J]. Acta Photonica Sinica, 2021, 50(6): 3
- Acta Photonica Sinica
- Vol. 50, Issue 6, 3 (2021)
Fig. 1. Filamentation formation mechanism and light intensity distribution in glass
Fig. 2. Schematic diagram of ultrafast laser cutting glass method and cutting effect
Fig. 3. Physical map of the experimental light path and the processing site
Fig. 4. Schematic diagram of optical path of femtosecond laser cutting glass
Fig. 5. The effect of defocusing distance on cross-section roughness and edge chipping
Fig. 6. OM images of the cross section of the glass samples under different defocusing distance
Fig. 7. The change of the optical path caused by the different refractive index after the laser enters the glass
Fig. 8. The effect of pulse energy on cross-section roughness and edge chipping
Fig. 9. OM images of the cross-section of the glass samples under different pulse energy
Fig. 10. The effect of scanning speed on cross-section roughness and edge chipping
Fig. 11. OM images of the cross-section of the glass samples under different scanning speed
Fig. 12. The effect of repetition rate on cross-section roughness and edge chipping
Fig. 13. OM images of the cross-section of the glass samples under different repetition rate
Fig. 14. Schematic diagram of pulse laser spot overlap rate
Fig. 15. The cross-section and chipping morphology images of the quartz glass cut sample obtained by the optimized parameters
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Table 1. Current status of commercial applications of ultrafast laser cutting glass
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Table 2. The main mechanical properties of the quartz glass used in the experiment
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