A one-step direct cutting method of 200 μm quartz glass using high-repetition frequency femtosecond laser combined with scanning galvanometer based on filament effect was proposed. Through the optimization of the processing process parameters， the fast and high-quality cutting of thin quartz glass is realized. The processing speed can be achieved 10 mm/s， the edge chipping is less 7.5 μm， and the roughness of the cross section is achieved 1 μm. The method realizes the simultaneous improvement of thin glass cutting efficiency and quality， and has a good application prospect in the field of laser processing.