• Acta Photonica Sinica
  • Vol. 50, Issue 6, 3 (2021)
Kai LIAO1、2, Wenjun WANG1、2, Xuesong MEI1、2, and Bin LIU1、2
Author Affiliations
  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an70054, China
  • 2School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an710049, China
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    DOI: 10.3788/gzxb20215006.0650101 Cite this Article
    Kai LIAO, Wenjun WANG, Xuesong MEI, Bin LIU. Femtosecond Laser Single-pass High Quality Direct Cutting Thin Quartz Glass Process Based on Filament Effect(Invited)[J]. Acta Photonica Sinica, 2021, 50(6): 3 Copy Citation Text show less

    Abstract

    A one-step direct cutting method of 200 μm quartz glass using high-repetition frequency femtosecond laser combined with scanning galvanometer based on filament effect was proposed. Through the optimization of the processing process parameters, the fast and high-quality cutting of thin quartz glass is realized. The processing speed can be achieved 10 mm/s, the edge chipping is less 7.5 μm, and the roughness of the cross section is achieved 1 μm. The method realizes the simultaneous improvement of thin glass cutting efficiency and quality, and has a good application prospect in the field of laser processing.
    Kai LIAO, Wenjun WANG, Xuesong MEI, Bin LIU. Femtosecond Laser Single-pass High Quality Direct Cutting Thin Quartz Glass Process Based on Filament Effect(Invited)[J]. Acta Photonica Sinica, 2021, 50(6): 3
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