Design of hybrid diffractive-refractive f-θ lens for CO2 laser drilling

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 35 >Issue 5 >Page 519 > Article

Infrared and Laser Engineering
Vol. 35, Issue 5, 519 (2006)

Design of hybrid diffractive-refractive f-θ lens for CO2 laser drilling

[in Chinese]^1、2、*, [in Chinese]¹, and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese]. Design of hybrid diffractive-refractive f-θ lens for CO2 laser drilling[J]. Infrared and Laser Engineering, 2006, 35(5): 519 Copy Citation Text

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References

[1] YOKOHAGI D,MIZUTANI Y,ICHIHASHI K,et al.Development of a high-performance UV-DPSS laser drillin system for PWB[C]/ /Proceedings of SPIE,Second International Symposium on Laser Precision Microfabrication,2002,4426:464-468.

[2] PARGELLIS A N,AU D,LAKE T V,et al.Formation of microvias in epoxy-glass composites by laser ablation[J].Optics and Laser Technology,1990,22(3):205-207.

[4] SWANSON G J,VELDKAMP W B.Diffractive optical elements for use in infrared systems[J].Optical Engineering,1989,28(6):605-608.

[6] Keiji Fuse.F-θ lens:United States Patent,6,324,015 B1[P].

[7] FUSE K,OKADA T,EBATA K.Diffractive/rerractive hybrid ftheta lens for laser drilling of multilayer printed circuit boards[C]//Proceedings of SPIE third Interntional Symposium on Laser Precision Microfabrication,2003,4830:95-100.

[in Chinese], [in Chinese], [in Chinese]. Design of hybrid diffractive-refractive f-θ lens for CO2 laser drilling[J]. Infrared and Laser Engineering, 2006, 35(5): 519

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