Irradiation experiments are conducted on the SiC ceramic using excimer lasers with different pulse number, single-pulse energy, and repetition frequency. The two-dimensional and three-dimensional damage morphologies of irradiation-damaged SiC ceramic are acquired, and the microscopic damage mechanism is analyzed. The results indicate that, with 193 nm excimer laser irradiating on SiC ceramic, both the photo-thermal and photo-chemical effects are involved and the photo-thermal effect is dominant. The macroscopic damage morphology is closely related to laser irradiation parameters and the increment of either the irradiation pulse number or single-pulse energy aggravates the irradiation damage. Increasing the laser repetition frequency results in a little reduction of scratch depth.