Feng Shi, Yong Shu, Ci Song, Ye Tian, Guipeng Tie, Shuai Xue, Hang Xiao. Advances in shape controllable and property controllable manufacturing technology for ultraviolet fused silica components with high precision and few defects[J]. High Power Laser and Particle Beams, 2020, 32(3): 032002
- High Power Laser and Particle Beams
- Vol. 32, Issue 3, 032002 (2020)
Fig. 1. Three axis IBF machine and IBF polished surface
Fig. 2. Five axis IBF machine and IBF polished surface
Fig. 3. Combined polishing method of material adding and removal
Fig. 4. Schematic of hydrodynamic effect polishing and polished surface
Fig. 5. Laser induced damage threshold of sample 1# and 2#
Fig. 6. Generalized numerical pressure distribution model and experimental verification
Fig. 7. Power spectrum density analysis of the data in three manufacture stages: initial data, smoothed data and finished data
Fig. 8. MRF removal functions in different regions
Fig. 9. Ion beam etching process
Fig. 10. Removing process of chemical defects
Fig. 11. High efficiency low damage combined machining technology of fused silica
Fig. 12. Magnetorheological finishing machines
Fig. 13. Ion beam figuring machines
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