Xiaofei YANG, Jia MENG, Lei SU, Yang LI, Wen WAN, Yaojun LYU, Juncai WANG, Jinyang DENG. Study on PR Remain and Leakage Current in Channel Dry Etching of HADS Array Substrate[J]. Optoelectronic Technology, 2024, 44(4): 328

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- Optoelectronic Technology
- Vol. 44, Issue 4, 328 (2024)
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