Researching | Non-Diaphragm Fiber Gas Pressure Sensor Based on Femtosecond Laser Machining

Journals >Laser & Optoelectronics Progress >Volume 56 >Issue 10 >Page 100601 > Article

Laser & Optoelectronics Progress
Vol. 56, Issue 10, 100601 (2019)

Non-Diaphragm Fiber Gas Pressure Sensor Based on Femtosecond Laser Machining

Yuan Jiang¹, Yi Jiang^1、*, Liuchao Zhang¹, and Sumei Wang²

Author Affiliations

¹ School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

² Laser Micro/Nano Fabrication Laboratory, Beijing Institute of Technology, Beijing 100081, China

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DOI: 10.3788/LOP56.100601 Cite this Article Set citation alerts

Yuan Jiang, Yi Jiang, Liuchao Zhang, Sumei Wang. Non-Diaphragm Fiber Gas Pressure Sensor Based on Femtosecond Laser Machining[J]. Laser & Optoelectronics Progress, 2019, 56(10): 100601 Copy Citation Text

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References

[1] Chen W M, Lei X H, Zhang W et al. Recent progress of optical fiber Fabry-Perot sensors[J]. Acta Optica Sinica, 38, 0328010(2018).

[2] Jiang Y, Ma W Y, Chen S F et al. A micro fiber optic high-temperature pressure sensor[J]. Optical Technique, 43, 12-15(2017).

[3] Yang C D, Wang M, Ge Y X et al. A miniature extrinsic fiber Fabry-Pérot pressure sensor[J]. Acta Optica Sinica, 30, 1358(2010).

[4] Wang J J, Xie J. Research of a kind of quartz optical fiber Fabry-Perot cavity wide-range pressure sensor[J]. Journal of Wuhan University of Technology, 38, 104-107(2016).

[5] Liao C R, Liu S, Xu L et al. Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement[J]. Optics Letters, 39, 2827(2014). http://europepmc.org/abstract/med/24978213

[6] Wang G J, Liu X L, Gui Z G et al. A high-sensitive pressure sensor using a single-mode fiber embedded microbubble with thin film characteristics[J]. Sensors, 17, 1192(2017). http://pubmedcentralcanada.ca/pmcc/articles/PMC5490688/

[7] Pevec S, Donlagic D. Miniature all-fiber Fabry-Perot sensor for simultaneous measurement of pressure and temperature[J]. Applied Optics, 51, 4536(2012). http://www.opticsinfobase.org/abstract.cfm?URI=ao-51-19-4536

[8] Zhang W H, Jiang J F, Wang S et al. Fiber-optic Fabry-Perot high-pressure sensor for marine applications[J]. Acta Optica Sinica, 37, 0206001(2017).

[9] Wu Z H, Liu T G, Jiang J F et al. Effect of thermal stress and residual gas pressure on the thermal response of optical fiber Fabry-Perot pressure sensor[J]. Acta Optica Sinica, 35, 0328005(2015).

[10] Zhang J, Jing Z G, Li A et al. All-silica fiber EFPI high static pressure sensor in fusion with simple structure[J]. Chinese Journal of Lasers, 43, 1010004(2016).

[11] Hu Y H, Jiang C, Sun S M et al. High sensitivity capillary structure optical fiber gas pressure sensor[J]. Journal of Optoelectronics·Laser, 29, 39-43(2018).

[12] Silva S, Coelho L, Frazão O. An all-fiber Fabry-Pérot interferometer for pressure sensing in different gaseous environments[J]. Measurement, 47, 418-421(2014). http://www.sciencedirect.com/science/article/pii/S0263224113004661

[13] Xu B, Wang C, Wang D N et al. Fiber-tip gas pressure sensor based on dual capillaries[J]. Optics Express, 23, 23484-23492(2015). http://www.ncbi.nlm.nih.gov/pubmed/26368448

[14] Xu B, Liu Y M, Wang D N et al. Optical fiber Fabry-Pérot interferometer based on an air cavity for gas pressure sensing[J]. IEEE Photonics Journal, 9, 7102309(2017). http://ieeexplore.ieee.org/document/7887721/

[15] Deng D S, Qin X, Huang G J et al. Design and application of copper deposited tungsten disulfide film coated thin-core optical fiber gas sensor[J]. Acta Optica Sinica, 37, 1106002(2017).

[16] Xia B, Jiang L, Wang S M et al. Femtosecond laser drilling of micro-holes[J]. Chinese Journal of Lasers, 40, 0201001(2013).

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Yuan Jiang, Yi Jiang, Liuchao Zhang, Sumei Wang. Non-Diaphragm Fiber Gas Pressure Sensor Based on Femtosecond Laser Machining[J]. Laser & Optoelectronics Progress, 2019, 56(10): 100601

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