Dong-mei LIU, Bo-yang WEI, Xiu-hua FU, Jing ZHANG, Suo-tao DONG, Shuang LI. Development of Polycarbonate High Strength Ultra-low Reflectivity Film[J]. Acta Photonica Sinica, 2020, 49(12): 216
- Acta Photonica Sinica
- Vol. 49, Issue 12, 216 (2020)
Fig. 1. Refractive index of two materials
Fig. 2. Theoretical design curve of antireflection film
Fig. 3. Surface roughness of substrate at different plasma treatment times
Fig. 4. The surface roughness of the substrate during different plasma treatment times
Fig. 5. Stress fitting curve
Fig. 6. Spectral test curve
Fig. 7. Rate change curve
Fig. 8. Schematic diagram of PID control electron gun current
Fig. 9. Deposition rate after PID adjustment
Fig. 10. PID stable film forming rate spectral test curve
|
Table 1. Technical indexes of subtracting the reverse membrane
|
Table 2. Polycarbonate synthesis and performance
| ||||||||||||||||||||||||||||||||||||||||
Table 3. Vacuum cooling parameters
| ||||||||||||||
Table 4. Monolayer stress of the two materials
|
Table 5. Notched ion source process parameters record table
|
Table 6. Layered gradient stress of anti-reflection film
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20