Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry

Yanli Du; Huimin Yan; Yong Wu; Xiaoqiang Yao; Yongjun Nie; Baixuan Shi

Journals >Chinese Optics Letters >Volume 2 >Issue 12 >Page 12701 > Article

Chinese Optics Letters
Vol. 2, Issue 12, 12701 (2004)

Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry

Yanli Du^1、2, Huimin Yan^1、2, Yong Wu^1、2, Xiaoqiang Yao^1、2, Yongjun Nie^1、2, and Baixuan Shi^1、2

Author Affiliations

¹State Key Lab of Modern Optical Instrumentation, National Engineering &

²Technology Research Center for Optical Instrument, Zhejiang University, Hangzhou 310027

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Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, Baixuan Shi. Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry[J]. Chinese Optics Letters, 2004, 2(12): 12701 Copy Citation Text

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