Electrostatic deformation of membrane mirrors

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 36 >Issue 2 >Page 274 > Article

Infrared and Laser Engineering
Vol. 36, Issue 2, 274 (2007)

Electrostatic deformation of membrane mirrors

[in Chinese]^{1、2、3、*}, [in Chinese]^1、2、3, [in Chinese]^1、3, and [in Chinese]^1、3

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Electrostatic deformation of membrane mirrors[J]. Infrared and Laser Engineering, 2007, 36(2): 274 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Electrostatic deformation of membrane mirrors[J]. Infrared and Laser Engineering, 2007, 36(2): 274

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