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    Journals >Acta Optica Sinica >Volume 34 >Issue 10 >Page 1031002 > Article
    • Acta Optica Sinica
    • Vol. 34, Issue 10, 1031002 (2014)
    Properties of Iridium Thin Films Fabricated by Atomic Layer Deposition
    Ye Zhijie*, Shen Weidong, Zhang Yueguang, Zhang Xing, Yuan Wenjia, Li Yanghui, and Liu Xu
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    DOI: 10.3788/aos201434.1031002 Cite this Article Set citation alerts
    Ye Zhijie, Shen Weidong, Zhang Yueguang, Zhang Xing, Yuan Wenjia, Li Yanghui, Liu Xu. Properties of Iridium Thin Films Fabricated by Atomic Layer Deposition[J]. Acta Optica Sinica, 2014, 34(10): 1031002 Copy Citation Text show less
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    Ye Zhijie, Shen Weidong, Zhang Yueguang, Zhang Xing, Yuan Wenjia, Li Yanghui, Liu Xu. Properties of Iridium Thin Films Fabricated by Atomic Layer Deposition[J]. Acta Optica Sinica, 2014, 34(10): 1031002
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