Calibration of the System Errors in Pinhole Diffracted Interferometer

Xu Jiajun; Xing Tingwen; Xu Fuchao

doi:10.3788/aos201333.0712003

[1] G E Sommargren, D W Phillion, M A Johnson, et al.. 100-picometer interferometry for EUVL［C］. SPIE, 2002, 4688: 316-328.

[2] Sugisaki Katsumi, Zhu Yucong. Present status of the ASET at-wavelength phase-shifting point diffraction interferometer ［C］. SPIE, 2000, 4146: 47-53.

[3] Patrick Naulleau, Kenneth Goldberg, Sang Lee, et al.. Characterization of the accuracy of EUV phase-shifting point diffraction interferometry［C］. SPIE, 1998, 3331: 114-122.

[4] Daniel Malacara. Optical Shop Testing ［M］. 3rd edition, Hoboken: John Wiley & Sons Inc, 2007. 19-54.

[5] Sang Hun Lee, Patrick P Naulleau, Kenneth A Goldberg, et al.. Phase shifting point diffraction interferometry at 193 nm ［J］. Appl Opt, 2000, 39(31): 5768-5772.

[6] Patrick P Naulleau, Kenneth A Goldberg. Dual-domain point diffraction interferometer ［J］. Appl Opt, 1999, 38(16): 3523-3532.

[7] Zhou Wanzhi, Lu Zhenwu. A point-diffraction holographic interferometer ［J］. Acta Optica Sinica, 1986, 6(12): 1130-1135.

[8] Xing Tingwen, He Guoliang, Shu Liang. Measurement error in the 193 nm phase-shifting point diffraction interferometer［J］. Opto-Electronic Enginerring, 2009, 36(2): 67-72.

[9] K A Goldberg, E Tejnil, J Bokor. A 3D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry［C］. Boston: Broceedings of Extreme Ultro Violet Litho Graphyy, 1996. 133-137.

[10] Lu Zengxiong, Jin Chunshui, Ma Dongmei, et al.. Analysis of effect of tiny pinhole deviation on far-field wave-front quality［J］. Acta Optica Sinica, 2011, 31(8): 0812002.

[11] Xu Jiajun, Xing Tingwen. Analysis of two-dimensional pinhole vector diffraction in visible light ［J］. Acta Optica Sinica, 2011, 31(12): 1205003.

[12] K Otaki, T Yamamoto, Y Fukuda, et al.. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror. ［J］. J Vac Sci Technol B, 2002, 20(1): 295-300.

[13] Donald W Phillion, Gary E Sommargren, Michael A Johnson, et al.. Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems [C]. SPIE, 2005, 5869: 58690R.

[14] Zhang Yu, Jin Chunshui, Ma Dongmei, et al.. Study of calibrating algorithm for wavefront reference source of point diffraction interferometer ［J］. Chinese J Lasers, 2012, 39(3): 0308001.

[15] Toshiaki Matsuura, Satoru Okagaki, Takaaki Nakamura, et al.. Measurement accuracy in phase-shifting point diffraction interferometer with two optical fibers ［J］. Opt Rev, 2007, 14(6): 401-405.

[16] Patrick Naulleau, Kenneth A Goldberg, Sang H. Lee, et al.. Extreme-ultraviolet phase-shifting point-diffraction interferometer a wave-front metrology tool with sub-angstrom reference-wave accuracy［J］. Appl Opt, 1999, 38(35): 7252-7263.

[17] Kazuya Ota, Takahiro Yamamoto, Yusuke Fukuda, et al.. Advanced point diffraction interferometer for EUV aspherical mirrors［C］. SPIE, 2001, 4343: 543-550.

CLP Journals