Titanic thin films have been prepared on K9 substrates by ion beam sputtering method. The surface morphology is studied by using atomic force microscopy (AFM). The images show that surface is isotropic and self-affine. The surface can be quantitatively described by the roughness exponent α, the lateral correlation length ξ, and the interface width w. The value α of the Ti film is measured to be 0.72, which gives the related local surface fractal dimension D s2.28. From these values, it is suggested that the growth of Ti film is more consistent with a conservative growth process and can be described by using a noisy Kuramoto-Sivashinsky equation.