Pengfei Wang, Fengyan He, Jianjun Liu, Fangzhou Shu, Bin Fang, Tingting Lang, Xufeng Jing, and Zhi Hong*
Fig. 1. (a) Schematic diagram of a high-Q all-silicon terahertz metasurface consisting of periodic air-porous tetramers. The periods of the unit cell are Λx=Λy=Λ=300 μm, and the thickness of the metasurface is 150 μm. (b) SEM picture of one fabricated metasurface when r1=35 μm, r2=55 μm.
Fig. 2. (a) Calculated transmissions of metasurfaces with different r1 when r2=55 μm, where three Fano resonances are marked as f1, f2, and f3. (b), (c) Resonance frequencies and Q factors of f1, f2 with respect to r1. (d) Electric field (Ez) or magnetic field (Hz) of resonance f1, f2, and f3, when r1=45 μm.
Fig. 3. Dispersion relations of (a) TE modes and (b) TM modes as a function of k(Λ/π) simulated with the lattice constant of 300 μm (blue) and 150 μm (red) when r1=r2=55 μm. (c) Electric fields (Ez) or magnetic fields (Hz) in the x−y plane of the 10 interested TE and TM modes at Γ=0.
Fig. 4. (a) Calculated transmissions of the metasurface in ipsilateral configuration with different r1 when r2 =55 μm. (b) Electric field (Ez) or magnetic field (Hz) of resonance f1, f2, when r1=45 μm. (c), (d) Resonance frequencies and Q factors of f1, f2 with respect to r1.
Fig. 5. (a), (b) Calculated and measured transmissions of three diagonal configuration metasurfaces with circular truncated cone air holes, loss tangent of 0.0001 is considered in calculations. (c) Three enlarged views of measured and Fano fitted resonance f2.
Fig. 6. (a) Transmissions of a high-Q metasurface (r1=25 μm) irradiated at different pump powers. (b) Enlarged view of the resonance f2.