Pengfei Wang, Fengyan He, Jianjun Liu, Fangzhou Shu, Bin Fang, Tingting Lang, Xufeng Jing, Zhi Hong. Ultra-high-Q resonances in terahertz all-silicon metasurfaces based on bound states in the continuum[J]. Photonics Research, 2022, 10(12): 2743
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