[1] Gao Honggang, Chen Bin, Cao Jianlin. Fabricating technology for supersmooth surfaces[J]. Optics and Precision Engineering, 1995, 3(1): 57~60
[3] R. W. Dietz, J. M. Bennett. Bowl feed technique for producing supersmooth optical surfaces[J]. Appl. Opt., 1966, 5(5): 881~882
[4] J. V. Wingerden, H. J. Frankena, B. A. V. der Zwan. Production and measurement of superpolished surfaces[J]. Opt. Engng., 1992, 31(5): 1086~1092
[5] A. Leistner. Progress report on teflon polishers for precision optical flats[J]. Appl. Opt., 1972, 11(4): 960~961
[6] A. Leistner, E. G. Thwaite, F. Lesha et al.. Polishing study using teflon and pitch laps to produce flat and supersmooth surfaces[J]. Appl. Opt., 1992, 31(10): 1472~1482
[7] Y. Namba, H. Tsuwa. Ultra-fine finishing of sapphire single crystal[J]. Ann. CIRP, 1977, 26(1): 325~329
[8] J. M. Bennett, J. J. Shaffer, Y. Shubano et al.. Float polishing of optical materials[J]. Appl. Opt., 1987, 26(4): 696~703
[9] Y. Mori, K. Yamauchi, K. Endo. Elastic emission machining[J]. Precision Engineering, 1987, 9(3): 123~128
[10] Kim Jeong-Du. Motion analysis of powder particles in EEM using cylindrical polyurethane wheel[J]. Internat. J. Machine Tools & Manufacture, 2002, 42(1): 21~28
[11] K. Yamamura, H. Mimura, K. Yamauchi et al.. Aspheric surface fabrication in nm-level accuracy by numerically controlled plasma chemical vaporization machining and elastic emission machining[C]. SPIE, 2002, 4782: 265~270
[12] M. Kanaoka, C. Liu, K. Nomura et al.. Processing efficiency of elastic emission machining for low-thermal-expansion material[J]. Surf. Interface Anal., 2008, 40(6-7): 1002~1006
[13] T. W. Drueding. Ion beam figuring of small optical components[J]. Opt. Engng., 1995, 34(12): 3565~33571
[14] M. Weiser. Ion beam figuring for lithography optics[J]. Nucl. Instr. Meth. Phys. Res., 2009, 267(8-9): 1390~1393
[15] L. D. Bollinger, C. B. Zarowin. Rapid, nonmechanical, damage-free figuring of optical surfaces using plasma-assisted chemical etching (PACE)[C]. SPIE, 1988, 966: 82~97
[16] L. D. Bollinger. G. Steiberg, C. B. Zarowin. Rapid optical figuring surfaces with plasma assisted chemical etching (PACE)[C]. SPIE, 1991, 1618: 14~21
[17] Y. Mori, K. Yamauchi, K. Yamamura et al.. Development of plasma chemical vaporization machining and elastic emission machining systems for coherent X-ray optics[C]. SPIE, 2001, 4501: 30~42
[18] H. Takino, N. Shibata, H. Itoh et al.. Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode[J]. Appl. Opt., 2002, 41(19): 3971~3977
[19] M. Tricard, P. Dumas, G. Forbes. Sub-aperture approaches for asphere polishing and metrology[C]. SPIE, 2005, 5638: 284~299
[20] P. Dumas, D. Golini, M. Tricard. Improve figure and finish of diamond turned surfaces with magneto-rheological finishing(MRF)[C]. SPIE, 2005, 5786: 296~304
[21] Gao Honggang, Cao Jianlin, Chen Bin. Float polishing for supersmooth surfaces[J]. Optical Technique, 1995, 21(3): 40~43
[22] Zhenxiang Shen, Bin Ma, Zhanshan Wang et al.. Fabrication of flat and surpersmooth surfaces with bowl-feed polishing process[C]. SPIE, 2007, 6722: 67220U
[25] Zhang Feng, Yu Jingchi, Zhang Xuejun et al.. Magnetorheological fishing technology[J]. Optics and Precision Engineering, 1999, 7(5): 1~8
[27] Liu Xiangyang, Wang Lijiang, Gao Chunfu et al.. Experimental study on cryogenic polishing optical material without abrasive[J]. Chinese J. Mechanical Engineering, 2002, 38(6): 47~50
[28] Yu Zhaoqing, Yang Zhonggao, Huang Zhigang et al.. Study on ultra-smooth surface polishing based on liquid two-dimension vibration[J]. Manufacturing Technology and Machine, 2007, (5): 90~92