• Laser & Optoelectronics Progress
  • Vol. 48, Issue 8, 82202 (2011)
Ma Zhanlong*, Liu Jian, and Wang Junlin
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.3788/lop48.082202 Cite this Article Set citation alerts
    Ma Zhanlong, Liu Jian, Wang Junlin. Development and Application of Ultra-Smooth Optical Surface Polishing Technology[J]. Laser & Optoelectronics Progress, 2011, 48(8): 82202 Copy Citation Text show less
    References

    [1] Gao Honggang, Chen Bin, Cao Jianlin. Fabricating technology for supersmooth surfaces[J]. Optics and Precision Engineering, 1995, 3(1): 57~60

    [2] Li Xishan, Ge Hezhong. The technology of ultra-smooth surface[J]. Laser & Optoelectronics Progress, 1998, 35(11): 1~9

    [3] R. W. Dietz, J. M. Bennett. Bowl feed technique for producing supersmooth optical surfaces[J]. Appl. Opt., 1966, 5(5): 881~882

    [4] J. V. Wingerden, H. J. Frankena, B. A. V. der Zwan. Production and measurement of superpolished surfaces[J]. Opt. Engng., 1992, 31(5): 1086~1092

    [5] A. Leistner. Progress report on teflon polishers for precision optical flats[J]. Appl. Opt., 1972, 11(4): 960~961

    [6] A. Leistner, E. G. Thwaite, F. Lesha et al.. Polishing study using teflon and pitch laps to produce flat and supersmooth surfaces[J]. Appl. Opt., 1992, 31(10): 1472~1482

    [7] Y. Namba, H. Tsuwa. Ultra-fine finishing of sapphire single crystal[J]. Ann. CIRP, 1977, 26(1): 325~329

    [8] J. M. Bennett, J. J. Shaffer, Y. Shubano et al.. Float polishing of optical materials[J]. Appl. Opt., 1987, 26(4): 696~703

    [9] Y. Mori, K. Yamauchi, K. Endo. Elastic emission machining[J]. Precision Engineering, 1987, 9(3): 123~128

    [10] Kim Jeong-Du. Motion analysis of powder particles in EEM using cylindrical polyurethane wheel[J]. Internat. J. Machine Tools & Manufacture, 2002, 42(1): 21~28

    [11] K. Yamamura, H. Mimura, K. Yamauchi et al.. Aspheric surface fabrication in nm-level accuracy by numerically controlled plasma chemical vaporization machining and elastic emission machining[C]. SPIE, 2002, 4782: 265~270

    [12] M. Kanaoka, C. Liu, K. Nomura et al.. Processing efficiency of elastic emission machining for low-thermal-expansion material[J]. Surf. Interface Anal., 2008, 40(6-7): 1002~1006

    [13] T. W. Drueding. Ion beam figuring of small optical components[J]. Opt. Engng., 1995, 34(12): 3565~33571

    [14] M. Weiser. Ion beam figuring for lithography optics[J]. Nucl. Instr. Meth. Phys. Res., 2009, 267(8-9): 1390~1393

    [15] L. D. Bollinger, C. B. Zarowin. Rapid, nonmechanical, damage-free figuring of optical surfaces using plasma-assisted chemical etching (PACE)[C]. SPIE, 1988, 966: 82~97

    [16] L. D. Bollinger. G. Steiberg, C. B. Zarowin. Rapid optical figuring surfaces with plasma assisted chemical etching (PACE)[C]. SPIE, 1991, 1618: 14~21

    [17] Y. Mori, K. Yamauchi, K. Yamamura et al.. Development of plasma chemical vaporization machining and elastic emission machining systems for coherent X-ray optics[C]. SPIE, 2001, 4501: 30~42

    [18] H. Takino, N. Shibata, H. Itoh et al.. Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode[J]. Appl. Opt., 2002, 41(19): 3971~3977

    [19] M. Tricard, P. Dumas, G. Forbes. Sub-aperture approaches for asphere polishing and metrology[C]. SPIE, 2005, 5638: 284~299

    [20] P. Dumas, D. Golini, M. Tricard. Improve figure and finish of diamond turned surfaces with magneto-rheological finishing(MRF)[C]. SPIE, 2005, 5786: 296~304

    [21] Gao Honggang, Cao Jianlin, Chen Bin. Float polishing for supersmooth surfaces[J]. Optical Technique, 1995, 21(3): 40~43

    [22] Zhenxiang Shen, Bin Ma, Zhanshan Wang et al.. Fabrication of flat and surpersmooth surfaces with bowl-feed polishing process[C]. SPIE, 2007, 6722: 67220U

    [23] Dai Yifan, Zhou Lin, Xie Xuhui et al.. Deterministic figuring in optical machining by ion beam [J]. Acta Optica Sinica, 2008, 28(6): 1131~1135

    [24] Dai Yifan, Shi Feng, Peng Xiaoqiang et al.. Deterministic figuring in optical machining by magnetorheological finishing[J]. Acta Optica Sinica, 2010, 30(1): 198~205

    [25] Zhang Feng, Yu Jingchi, Zhang Xuejun et al.. Magnetorheological fishing technology[J]. Optics and Precision Engineering, 1999, 7(5): 1~8

    [26] Wu Jianfen, Lu Zhenwu, Zhang Hongxin et al.. Optimized dwell times solution for optics in ion beam figuring[J]. Acta Optica Sinica, 2010, 30(1): 192~197

    [27] Liu Xiangyang, Wang Lijiang, Gao Chunfu et al.. Experimental study on cryogenic polishing optical material without abrasive[J]. Chinese J. Mechanical Engineering, 2002, 38(6): 47~50

    [28] Yu Zhaoqing, Yang Zhonggao, Huang Zhigang et al.. Study on ultra-smooth surface polishing based on liquid two-dimension vibration[J]. Manufacturing Technology and Machine, 2007, (5): 90~92

    CLP Journals

    [1] Liu Jian, Wang Shaozhi, Zhang Linghua, Wang Junlin. Computer Controlled Ultra-Smooth Polishing High Order Rotary Symmetrical Aspheric Lens[J]. Chinese Journal of Lasers, 2013, 40(8): 816001

    [2] Liu Jianning, Jiang Junbiao, Lian Tianhong, Zhong Cong, He Xiaoli. Intensity Distribution Properties of Output Light in Total Reflection Prisms Laser Gyro with Cavity Stresses[J]. Chinese Journal of Lasers, 2013, 40(11): 1102003

    [3] Zhang Feng, Deng Weijie. Magnetic-Medium Assistant Polishing of Silicon Modification Layer on Silicon Carbide Surface[J]. Acta Optica Sinica, 2012, 32(11): 1116001

    Ma Zhanlong, Liu Jian, Wang Junlin. Development and Application of Ultra-Smooth Optical Surface Polishing Technology[J]. Laser & Optoelectronics Progress, 2011, 48(8): 82202
    Download Citation