[1] B. Dong, H. Cai, J. M. Tsai, D. L. Kwong, and A. Q. Liu, “An on-chip opto-mechanical accelerometer,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (MEMS), Taipei, pp. 641 644, 2013.
[2] K. Zandi, J. A. Belanger, and Y. A. Peter, “Design and demonstration of an in-plane silicon-on-insulator optical MEMS Fabry-perot-based accelerometer integrated with channel waveguides,” Journal of Microelectromechanical Systems, 2012, 21(6): 1464 1470.
[3] H. Seidel, U. Fritsch, R. Gottinger, J. Schalk, J. Walter, and K. Ambaum, “A peiezoresistive silicon accelerometer with monolithically integrated CMOS-circuitry,” in the 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95, Stockholm, Sweden, pp. 597 600, 1995.
[4] C. Yeh and K. Najafi, “A low-voltage bulk-silicon tunneling-based microaccelerometer,” in International Electron Devices Meeting, 1995, Washington, DC, pp. 593 596, 1995.
[5] A .M. Leung, J. Jones, E. Czyzewska, J. Chen, and B. Woods, “Micromachened accelerometer based on convection heat transfer,” in Proceeding of IEEE Micro Electro Mechanical Systems Workshop (MEMS’98), Heidelberg, Germany, pp. 627 630, 1998 .
[6] C. Sun, C. Wang, and W. Fang, “On the sensitivity improvement of CMOS capacitive accelerometer,” Sensors & Actuators A Physical, 2008, 14(12): 347 352.
[7] D. N. Hutchison and S. A. Bhave, “Z-axis optomechanical accelerometer,” in Proceeding of IEEE Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, pp. 615 619, 2012.
[8] N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined inertia sensors,” Proceeding of the IEEE, 1998, 86(8): 1640 1659.
[9] B. E. Boser and R. T. Howe, “Surface micromachined accelerometer,” IEEE Journal of Solid-State Circuits, 1996, 31(3): 366 375.
[10] J. F. Bauters, M. J. R. Heck, D. John, D. Dai, M. C. Tien, J. S. Barton, et al., “Ultra-low-loss high-aspect-ratio Si3N4 waveguides,” Optics Express, 2011, 19(4): 3163 3167.
[11] V. A. Aksyuk, M. E. Simon, F. Pardo, S. Arney, D. Lopez and A.Villanueva, A 2002 Optical MEMS design for telecommunications applications Solid-State Sensor, Actuator and Microsystem Workshop (Hilton Head Island, SC, 2002).
[12] G. Barillaro, A. Molfese, A. Nannini, and F. Pieri, “Analysis, simulation and relative performances of two kinds of serpentine spring,” Journal of Micromechanics & Microengineering, 2005, 15(4): 736 746.
[13] L. D. Landau, L. P. Pitaevskii, A. M. Kosevich, and E. M. Lifshitz, Theory of elasticity. Massachusetts: Addison-Wesley, Inc. Reading, 1959.
[14] G. K. Fedder, “Simulation of microelectromechanical systems,” Ph.D. dissertation, Dept. University of California, Berkeley, 1994.
[15] M. I. Younis, MEMS linear and nonlinear statics and dynamics. Berlin: Springer, 2011.
[16] W. T. Thomoson and M. D Dahleh, Theory of vibration with applications. New Jersey: Prentice Hall, 1998.
