• Chinese Journal of Lasers
  • Vol. 48, Issue 13, 1303001 (2021)
Xinning Wu1, Zhaoyang Liu1, Mingjia Liu1, Yuntao Zhao1, Haoran Qi1, Mei Zhou1、*, Huixing Shen1、**, and Degang Zhao2
Author Affiliations
  • 1Department of Applied Physics, College of Science, China Agricultural University, Beijing 100083, China
  • 2State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
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    DOI: 10.3788/CJL202148.1303001 Cite this Article Set citation alerts
    Xinning Wu, Zhaoyang Liu, Mingjia Liu, Yuntao Zhao, Haoran Qi, Mei Zhou, Huixing Shen, Degang Zhao. Compensation Effect of Carbon Impurities on the Resistivity of p-GaN[J]. Chinese Journal of Lasers, 2021, 48(13): 1303001 Copy Citation Text show less
    Room-temperature PL spectra for samples A, B, C, D, and E
    Fig. 1. Room-temperature PL spectra for samples A, B, C, D, and E
    Measuring results of secondary ion mass spectroscopy for three samples. (a) Sample B; (b) sample C; (c) sample D
    Fig. 2. Measuring results of secondary ion mass spectroscopy for three samples. (a) Sample B; (b) sample C; (c) sample D
    SampleGrowthtemperature /Reactionchamberpressure /kPaNH3 flow /(L·min-1)TMGa flow /(mL·min-1)Cp2Mgflow /(mL·min-1)Resistivity /(Ω·cm)Holemobility /(cm2·V-1·s-1)Holeconcentration /(1017 cm-3)
    A100013.35181102.1613.42.15
    B102013.35181102.228.63.27
    C103013.35181101.4910.34.07
    D104013.35181101.519.34.46
    E105013.35181101.439.14.81
    Table 1. Growth condition and Hall test results for p-GaN samples
    SampleConcentration of particles /(1019 cm-3)Growth temperature /℃
    MgCH
    B1.600.04000.2201020
    C2.160.03570.2751030
    D2.000.01700.1501040
    Table 2. Particle concentration of magnesium, carbon, and hydrogen, which measured by secondary ion mass spectra
    Xinning Wu, Zhaoyang Liu, Mingjia Liu, Yuntao Zhao, Haoran Qi, Mei Zhou, Huixing Shen, Degang Zhao. Compensation Effect of Carbon Impurities on the Resistivity of p-GaN[J]. Chinese Journal of Lasers, 2021, 48(13): 1303001
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