• Acta Optica Sinica
  • Vol. 32, Issue 4, 430002 (2012)
Wu Tao1、2、*, Wang Xinbing1, Tang Jian1, Wang Shaoyi1, Rao Zhiming1, Yang Chenguang1, and Lu Hong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201232.0430002 Cite this Article Set citation alerts
    Wu Tao, Wang Xinbing, Tang Jian, Wang Shaoyi, Rao Zhiming, Yang Chenguang, Lu Hong. Extreme Ultraviolet and Visible Emission Spectroscopic Characterization of CO2 Laser Produced Tin Plasma for Lithography[J]. Acta Optica Sinica, 2012, 32(4): 430002 Copy Citation Text show less
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    CLP Journals

    [1] Wu Tao, Wang Xinbing, Wang Shifang, Tan Rong. Research on Pulsed CO2 Laser Produced Sn Plasma Plume Expansion Properties by Shadowgraph Technique[J]. Chinese Journal of Lasers, 2013, 40(1): 102003

    Wu Tao, Wang Xinbing, Tang Jian, Wang Shaoyi, Rao Zhiming, Yang Chenguang, Lu Hong. Extreme Ultraviolet and Visible Emission Spectroscopic Characterization of CO2 Laser Produced Tin Plasma for Lithography[J]. Acta Optica Sinica, 2012, 32(4): 430002
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