[1] Chen M J, Wang H Y, Cheng J et al. Progress in detection and suppression techniques for processing-induced sub-surface defects of fused silica optical elements[J]. Journal of Mechanical Engineering, 57, 1-19(2021).
[2] Chen C, Sun A Y, Ju B F et al. Width and depth gauging of rectangular subsurface defects based on all-optical laser-ultrasonic technology[J]. Applied Acoustics, 191, 108684(2022).
[3] Zhao D F, Cui J N, Bian X Y. Overview of subsurface damage detection technologies for ultra-smooth quartz components[C], 364-369(2022).
[4] Dwivedi S K, Vishwakarma M, Soni P A. Advances and researches on non destructive testing: a review[J]. Materials Today: Proceedings, 5, 3690-3698(2018).
[5] Qiu X T. Subsurface defect detection technology of optical components based on quantum dot marking[D], 1-5(2021).
[6] Zhang J P, Sun H Y, Wang S L et al. Three-dimensional reconstruction technology of subsurface defects in fused silica optical components[J]. Acta Optica Sinica, 40, 0216001(2020).
[7] Zhang J P. Research on key technologies of subsurface/body defect detection of fused quartz optical elements[D], 1-10(2020).
[8] Hu C L, Bi G, Ye H et al. Research on detection of subsurface damage on grinding optical elements[J]. Journal of Synthetic Crystals, 43, 2929-2934(2014).
[9] Wang H L. Study on measuring the depth and position of subsurface damage based on total internal reflection method[D], 11-20(2016).
[10] Zhu X J. Research on total internal reflection coarse positioning system in subsurface damage measurement technology[D](2015).
[11] Bashkansky M, Duncan M D, Kahn M et al. Subsurface defect detection in ceramics by high-speed high-resolution optical coherent tomography[J]. Optics Letters, 22, 61-63(1997).
[12] Zhang Y X. Study on the method of improving the imaging depth of frequency domain optical coherence tomography[D], 6-11(2017).
[13] Wang C M, Gao W R. Measurement of scattering coefficient of glass subsurface defects based on micron SDOCT[J]. Acta Optica Sinica, 41, 0729001(2021).
[14] Wu X P, Gao W R, Zhang Y X et al. New method for non-destructive quantitative measurement of subsurface damage within glasses[J]. Chinese Journal of Lasers, 44, 0603001(2017).
[15] Sindel J, Petschelt A, Grellner F et al. Evaluation of subsurface damage in CAD/CAM machined dental ceramics[J]. Journal of Materials Science: Materials in Medicine, 9, 291-295(1998).
[16] Lee J H, Na S, Jeong J et al. Comparative near infrared through-focus scanning optical microscopy for 3D memory subsurface defect detection and classification[J]. Proceedings of SPIE, 11611, 116110T(2021).
[17] Nie H T, Peng R J, Ren J J et al. A through-focus scanning optical microscopy dimensional measurement method based on deep-learning classification model[J]. Journal of Microscopy, 283, 117-126(2021).
[18] Zhang Z G, Ren J J, Peng R J et al. Focused and TSOM images two-input deep-learning method for through-focus scanning measuring[J]. Applied Sciences, 12, 3430(2022).
[19] Qu Y F, Ren J J, Peng R J et al. Imaging error compensation method for through-focus scanning optical microscopy images based on deep learning[J]. Journal of Microscopy, 283, 93-101(2021).
[20] Rim M H, Agocs E, Dixson R et al. Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy[J]. Journal of Vacuum Science & Technology B, 38, 050602(2020).
[21] Ryabko M V, Koptyaev S N, Shcherbakov A V et al. Method for optical inspection of nanoscale objects based upon analysis of their defocused images and features of its practical implementation[J]. Optics Express, 21, 24483-24489(2013).
[22] Ayal G, Malkes E, Aharoni E et al. Sensitivity of LWR and CD linearity to process conditions in active area[J]. Proceedings of SPIE, 7971, 79711Q(2011).
[23] Zhu J L, Liu J M, Xu T L et al. Optical wafer defect inspection at the 10 nm technology node and beyond[J]. International Journal of Extreme Manufacturing, 4, 032001(2022).
