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    Journals >Acta Optica Sinica >Volume 36 >Issue 1 >Page 111006 > Article
    • Acta Optica Sinica
    • Vol. 36, Issue 1, 111006 (2016)
    Source Mask Optimization Based on Dynamic Fitness Function
    Yang Chaoxing1、2、*, Li Sikun1、2, and Wang Xiangzhao1、2
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201636.0111006 Cite this Article Set citation alerts
    Yang Chaoxing, Li Sikun, Wang Xiangzhao. Source Mask Optimization Based on Dynamic Fitness Function[J]. Acta Optica Sinica, 2016, 36(1): 111006 Copy Citation Text show less
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    Article index updated: May. 19, 2024
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    Yang Chaoxing, Li Sikun, Wang Xiangzhao. Source Mask Optimization Based on Dynamic Fitness Function[J]. Acta Optica Sinica, 2016, 36(1): 111006
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